Integra® Pneumatic Valves, 1/2" Orifice, 3-way, Reverse Porting
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Ideal in point-of-use applications when low flow is required, including:
- High-purity, corrosive chemical handling
- Wet etch and clean (WEC) process chemicals
- Low volume bulk chemical delivery
- Chemical line sizes 1/2" or larger
Specifications
Function (refer to the 4th drawing above)
- Valve can be used with either common inlet or common outlet.
- In unactuated position flow is through Ports 2 and 3.
- In actuated position flow is through Ports 2 and 1.
Note: The red position indicator is UP when the valve is unactuated.
Dimension Note:
Dimensions are the same regardless of body material (PVDF or ECTFE) or nut material (PVDF, PFA or CPFA)
Port Connection | Dimensions | ||
A | B | C | |
1/2" Flaretek | 5.28" (134.1 mm) | 2.64" (67.1 mm) | 4.71" (119.6 mm) |
1/2" PureBond fusible pipe | 4.50" (114.3 mm) | 2.25" (57.2 mm) | 4.32" (109.7 mm) |
1/2" FNPT | 3.35" (85.1 mm) | 1.68" (42.7 mm) | 3.75" (95.2 mm) |
3/4" Flaretek | 5.52" (140.2 mm) | 2.76" (70.1 mm) | 4.83" (122.7 mm) |
3/4" PureBond fusible pipe | 4.50" (114.3 mm) | 2.25" (57.2 mm) | 4.32" (109.7 mm) |
3/4" FNPT | 5.25" (133.4 mm) | 3.02" (76.7 mm) | 5.09" (129.3 mm) |
Note:
- These valves are not field repairable. Contact Entegris for repair information.
Pressure range at: | 73°F (25°C) | 185°F (85°C) |
Common Port 2 | 29" Hg vacuum to 120 psig (980 mbar to 827 kPa) | 29" Hg vacuum to 90 psig (980 mbar to 621 kPa) |
Port 3 | 29" Hg vacuum to 90 psig (980 mbar to 621 kPa) | 29" Hg vacuum to 70 psig (980 mbar to 483 kPa) |
Port 1 | 29" Hg vacuum to 60 psig (980 mbar to 414 kPa) | 29" Hg vacuum to 45 psig (980 mbar to 310 kPa) |
Temperature range: | 73° to 150°F (23° to 65°C), ambient and fluid 75°F (24°C) for ECTFE external components, ambient and fluid | |
Pneumatic supply range: | 65 psig (448 kPa) minimum to 85 psig (586 kPa) maximum | |
Pneumatic supply port: | 1/8" FNPT | |
Materials: | All wetted parts are PFA and PTFE. Exterior actuator parts are PVDF. Interior actuator parts are PVDF, coated stainless steel, PTFE and Viton®. Secondary containment is PFA, PVDF, PTFE, PEEK and carbon-filled PEEK. Mounting base is polyethylene. | |
Typical flow factor: | 1.9 CV (27.2 KV) 1/2" Flaretek and Flaretek “SpaceSaver” port connections 3.2 CV (45.7 KV) for all other port connections |
Successfully Opted for software Updates
Part Number | Port 1 Connection | Port 3 Connection | Port 2 Connection | Options |
---|---|---|---|---|
D8-3C-12F-1C-6 | 3/4" Flaretek® | 3/4" Flaretek® | 3/4" Flaretek® | CPFA Flaretek® nut |
D8-3C-12F-1C-EC | 3/4" Flaretek® | 3/4" Flaretek® | 3/4" Flaretek® | ECTFE actuator with PFA nut |
D8-3C-12F-1C-OM | 3/4" Flaretek® | 3/4" Flaretek® | 3/4" Flaretek® | Omron position sensor |
D8-3C-12N-1C-EC | 3/4" FNPT | 3/4" FNPT | 3/4" FNPT | ECTFE actuator |
D8-3C-12N-1C-OM | 3/4" FNPT | 3/4" FNPT | 3/4" FNPT | Omron position sensor |
D8-3C-12P-1C-EC | 3/4" PureBond® pipe | 3/4" PureBond® pipe | 3/4" PureBond® pipe | ECTFE actuator |
D8-3C-12P-1C-OM | 3/4" PureBond® pipe | 3/4" PureBond® pipe | 3/4" PureBond® pipe | Omron position sensor |
D8-3C-12S1-1C-3 | 3/4" Flaretek® "SpaceSaver" | 3/4" Flaretek® | 3/4" Flaretek® | PFA Flaretek® nut |
D8-3C-12S1-1C-6 | 3/4" Flaretek® "SpaceSaver" | 3/4" Flaretek® | 3/4" Flaretek® | CPFA Flaretek® nut |
D8-3C-12S1-1C-EC | 3/4" Flaretek® "SpaceSaver" | 3/4" Flaretek® | 3/4" Flaretek® | ECTFE actuator with PFA nut |
D8-3C-12S2-1C-3 | 3/4" Flaretek® | 3/4" Flaretek® | 3/4" Flaretek® "SpaceSaver" | PFA Flaretek® nut |
D8-3C-12S2-1C-6 | 3/4" Flaretek® | 3/4" Flaretek® | 3/4" Flaretek® "SpaceSaver" | CPFA Flaretek® nut |
D8-3C-12S2-1C-EC | 3/4" Flaretek® | 3/4" Flaretek® | 3/4" Flaretek® "SpaceSaver" | ECTFE actuator with PFA nut |
D8-3C-12S3-1C-6 | 3/4" Flaretek® | 3/4" Flaretek® "SpaceSaver" | 3/4" Flaretek® | CPFA Flaretek® nut |
D8-3C-12S3-1C-EC | 3/4" Flaretek® | 3/4" Flaretek® "SpaceSaver" | 3/4" Flaretek® | ECTFE actuator with PFA nut |
D8-3C-8F-1C-6 | 1/2" Flaretek® | 1/2" Flaretek® | 1/2" Flaretek® | CPFA Flaretek® nut |
D8-3C-8F-1C-EC | 1/2" Flaretek® | 1/2" Flaretek® | 1/2" Flaretek® | ECTFE actuator with PFA nut |
D8-3C-8N-1C-OM | 1/2" FNPT | 1/2" FNPT | 1/2" FNPT | Omron position sensor |
D8-3C-8P-1C | 1/2" PureBond® pipe | 1/2" PureBond® pipe | 1/2" PureBond® pipe | N/A |
D8-3C-8P-1C-EC | 1/2" PureBond® pipe | 1/2" PureBond® pipe | 1/2" PureBond® pipe | ECTFE actuator |
D8-3C-8P-1C-OM | 1/2" PureBond® pipe | 1/2" PureBond® pipe | 1/2" PureBond® pipe | Omron position sensor |
D8-3C-8S1-1C-3 | 1/2" Flaretek® "SpaceSaver" | 1/2" Flaretek® | 1/2" Flaretek® | PFA Flaretek® nut |
D8-3C-8S1-1C-6 | 1/2" Flaretek® "SpaceSaver" | 1/2" Flaretek® | 1/2" Flaretek® | CPFA Flaretek® nut |
D8-3C-8S1-1C-EC | 1/2" Flaretek® "SpaceSaver" | 1/2" Flaretek® | 1/2" Flaretek® | ECTFE actuator with PFA nut |
D8-3C-8S2-1C-6 | 1/2" Flaretek® | 1/2" Flaretek® | 1/2" Flaretek® "SpaceSaver" | CPFA Flaretek® nut |
D8-3C-8S2-1C-EC | 1/2" Flaretek® | 1/2" Flaretek® | 1/2" Flaretek® "SpaceSaver" | ECTFE actuator with PFA nut |
D8-3C-8S3-1C-6 | 1/2" Flaretek® | 1/2" Flaretek® "SpaceSaver" | 1/2" Flaretek® | CPFA Flaretek® nut |
D8-3C-8S3-1C-EC | 1/2" Flaretek® | 1/2" Flaretek® "SpaceSaver" | 1/2" Flaretek® | ECTFE actuator with PFA nut |