Integra® Pneumatic Valves, 3/4" Orifice, 2-way, High Temperature, Normally Closed
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Notes:
- Not all configurations are permitted. Contact Entegris if multiple special order features are required.
- Pillar nuts, inserts and gauge rings included as standard.
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Reference Materials
CAD
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Applications
- High temperature, ultrapure corrosive chemical handling
- Photoresist stripping applications with high temperature sulfuric and phosphoric acid
- Chemical line sizes 3/4" to 1"
Specifications
| Port Connection | Flow Factor | Dimensions | ||||
| A | B | C | D | E | ||
| 3/4" Super 300 Type Pillar® fitting | 6.1 Cv (87.1 Kv) | 5.25" (133.4 mm) | 0.80" (20.3 mm) | 3.87" (98.3 mm) | 4.11" (104.4 mm) | 4.17" (105.9 mm) |
| 3/4" PrimeLock® | 6.1 Cv (87.1 Kv) | 5.92" (150.4 mm) | 0.96" (24.4 mm) | 4.23" (107.4 mm) | 4.47" (113.5 mm) | 4.53" (105.1 mm) |
| 3/4" PureBond® | 7.4 Cv (105.7 Kv) | 4.67" (118.6 mm) | 0.80" (20.3 mm) | 3.87" (98.3 mm) | 4.11" (104.4 mm) | 4.17" (105.9 mm |
| 3/4" Tube Stub | 6.1 Cv (87.1 Kv) | 5.07" (128.8 mm) | 0.80" (20.3 mm) | 3.87" (98.3 mm) | 4.11" (104.4 mm) | 4.17" (105.9 mm |
| 1" Super 300 Type Pillar fitting | 8.8 Cv (125.7 Kv) | 5.75" (146.1 mm) | 1.04" (26.4 mm) | 4.31" (109.5 mm) | 4.55" (115.6 mm) | 4.61" (117.1 mm) |
| 1" PrimeLock | 8.8 Cv (125.7 Kv | 6.26" (159.0 mm) | 1.12" (28.4 mm) | 4.39" (111.5 mm) | 4.63" (117.6 mm) | 4.69" (119.2 mm) |
| 1" PureBond | 9.8 Cv (140.0 Kv | 4.67" (118.6 mm) | 0.96" (24.4 mm) | 4.23" (107.4 mm) | 4.47" (113.5 mm) | 4.53" (105.1 mm) |
| 1" Tube Stub | 8.8 Cv (125.7 Kv | 5.74" (145.8 mm) | 0.96" (24.4 mm) | 4.23" (107.4 mm) | 4.47" (113.5 mm) | 4.53" (105.1 mm) |
Sensing Option Dimensional Information (shown in the 2nd and 3rd drawings above)
A Remote Position Indication option is available to monitor valve open and closed positions electronically.
Note: To enable the remote position indication option you must special order the Omron® sensor (-OM) on the valve. In addition, order Omron position sensor indicator (EE-SX770R or EE-SX770A), which are sold separately.
| Materials | Wetted parts | PFA, PTFE |
| Exterior parts | PVDF | |
| Pressure range | 29" Hg to 80 psig (980 mbar to 552 kPa) maximum rating at inlet or outlet port (see performance data)* | |
| Temperature range | 21° – 49°C (70° – 120°F), ambient for DE and DH versions 21° – 180°C (70° – 356°F), fluid for DH versions* 21° – 200°C (70° – 392°F), fluid for DE versions* |
|
| Proof pressure (DE versions only) | Tested at 255 kPa (37 psig) at 220°C (428°F) for 1 million pressure cycles | |
| Pneumatic supply pressure | 448.2 kPa (65 psig) minimum to 551.6 kPa (80 psig) maximum | |
| Pneumatic supply port | 1/8" FNPT | |
| Actuator exhaust connection (position sensor versions only) | 10-32 UNF | |
*Actual valve performance varies with pressure and temperature. Refer to actual ratings in performance charts.
Successfully Opted for software Updates
Part Numbers
| Part Number | Inlet | Outlet | 200°C Capability | Options |
|---|---|---|---|---|
| DE12-2C-12KP-OM | 3/4" PrimeLock® | 3/4" PureBond® pipe | Yes | Omron position sensor |
| DE12-2C-12KV-OM | 3/4" PrimeLock® | 3/4" PrimeLock® "SpaceSaver" | Yes | Omron position sensor |
| DE12-2C-12P-OM | 3/4" PureBond® pipe | 3/4" PureBond® pipe | Yes | Omron position sensor |
| DE12-2C-12PK-OM | 3/4" PureBond® pipe | 3/4" PrimeLock® | Yes | Omron position sensor |
| DE12-2C-12VK-OM | 3/4" PrimeLock® "SpaceSaver" | 3/4" PrimeLock® | Yes | Omron position sensor |
| DE12-2C-12VV-OM | 3/4" PrimeLock® "SpaceSaver" | 3/4" PrimeLock® "SpaceSaver" | Yes | Omron position sensor |
| DE12-2C-16KP-OM | 1" PrimeLock® | 1" PureBond® pipe | Yes | Omron position sensor |
| DE12-2C-16KV-OM | 1" PrimeLock® | 1" PrimeLock® "SpaceSaver" | Yes | Omron position sensor |
| DE12-2C-16PK-OM | 1" PureBond® pipe | 1" PrimeLock® | Yes | Omron position sensor |
| DE12-2C-16VK-OM | 1" PrimeLock® "SpaceSaver" | 1" PrimeLock® | Yes | Omron position sensor |
| DE12-2C-16VV-OM | 1" PrimeLock® "SpaceSaver" | 1" PrimeLock® "SpaceSaver" | Yes | Omron position sensor |
| DH12-2C-12K-OM | 3/4" PrimeLock® | 3/4" PrimeLock® | No | Omron position sensor |
| DH12-2C-12KP | 3/4" PrimeLock® | 3/4" PureBond® pipe | No | N/A |
| DH12-2C-12KP-OM | 3/4" PrimeLock® | 3/4" PureBond® pipe | No | Omron position sensor |
| DH12-2C-12KV | 3/4" PrimeLock® | 3/4" PrimeLock® "SpaceSaver" | No | N/A |
| DH12-2C-12KV-OM | 3/4" PrimeLock® | 3/4" PrimeLock® "SpaceSaver" | No | Omron position sensor |
| DH12-2C-12P-OM | 3/4" PureBond® pipe | 3/4" PureBond® pipe | No | Omron position sensor |
| DH12-2C-12P12PS3-N | 3/4" PureBond® pipe | 3/4" Super 300 Type Pillar® | No | Super 300 Type Pillar® nut included |
| DH12-2C-12PK | 3/4" PureBond® pipe | 3/4" PrimeLock® | No | N/A |
| DH12-2C-12PK-OM | 3/4" PureBond® pipe | 3/4" PrimeLock® | No | Omron position sensor |
| DH12-2C-12PS312P-N | 3/4" Super 300 Type Pillar® | 3/4" PureBond® pipe | No | Super 300 Type Pillar® nut included |
| DH12-2C-12VK | 3/4" PrimeLock® "SpaceSaver" | 3/4" PrimeLock® | No | N/A |
| DH12-2C-12VK-OM | 3/4" PrimeLock® "SpaceSaver" | 3/4" PrimeLock® | No | Omron position sensor |
| DH12-2C-12VV | 3/4" PrimeLock® "SpaceSaver" | 3/4" PrimeLock® "SpaceSaver" | No | N/A |
| DH12-2C-12VV-OM | 3/4" PrimeLock® "SpaceSaver" | 3/4" PrimeLock® "SpaceSaver" | No | Omron position sensor |
| DH12-2C-16-TS | 1" Tube Stub | 1" Tube Stub | No | N/A |
| DH12-2C-16F-TS-OM | 1" Tube Stub | 1" Tube Stub | No | Omron position sensor |
| DH12-2C-16KP | 1" PrimeLock® | 1" PureBond® pipe | No | N/A |
| DH12-2C-16KP-OM | 1" PrimeLock® | 1" PureBond® pipe | No | Omron position sensor |
| DH12-2C-16KV | 1" PrimeLock® | 1" PrimeLock® "SpaceSaver" | No | N/A |
| DH12-2C-16KV-OM | 1" PrimeLock® | 1" PrimeLock® "SpaceSaver" | No | Omron position sensor |
| DH12-2C-16P-OM | 1" PureBond® pipe | 1" PureBond® pipe | No | Omron position sensor |
| DH12-2C-16P16PS3-N | 1" PureBond® pipe | 1" Super 300 Type Pillar® | No | Super 300 Type Pillar® nut included |
| DH12-2C-16P3-N | 1" Super 300 Type Pillar® | 1" Super 300 Type Pillar® | No | Super 300 Type Pillar® nut included |
| DH12-2C-16PK | 1" PureBond® pipe | 1" PrimeLock® | No | N/A |
| DH12-2C-16PK-OM | 1" PureBond® pipe | 1" PrimeLock® | No | Omron position sensor |
| DH12-2C-16PS316P-N | 1" Super 300 Type Pillar® | 1" PureBond® pipe | No | Super 300 Type Pillar® nut included |
| DH12-2C-16VK | 1" PrimeLock® "SpaceSaver" | 1" PrimeLock® | No | N/A |
| DH12-2C-16VK-OM | 1" PrimeLock® "SpaceSaver" | 1" PrimeLock® | No | Omron position sensor |
| DH12-2C-16VV | 1" PrimeLock® "SpaceSaver" | 1" PrimeLock® "SpaceSaver" | No | N/A |
| DH12-2C-16VV-OM | 1" PrimeLock® "SpaceSaver" | 1" PrimeLock® "SpaceSaver" | No | Omron position sensor |
Notes:
- Not all configurations are permitted. Contact Entegris if multiple special order features are required.
- Pillar nuts, inserts and gauge rings included as standard.