Integra® WS Valves
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- CMP slurry dispense
- WEC ultrapure chemical handling
- TFT/LCD corrosive chemical handling
Specifications
Port connection | Flow factor | Dimensions | ||||||
A | B | C (pneumatic) | C (manual) | D | E | F | ||
1/4" PrimeLock | 0.31 Cv (0.27 Kv) | 111.5 mm (4.39") | 15.5 mm (0.61") | 113.5 mm (4.47") | 95.0 mm (3.74") | 55.8 mm (2.19") | 51.0 mm (2.01") | 34.0 mm (1.34") |
1/4" Flaretek | 0.31 Cv (0.27 Kv) | 108.0 mm (4.25") | 13.5 mm (0.53") | 111.5 mm (4.39") | 93.0 mm (3.66") | 54.0 mm (2.13") | 51.0 mm (2.01") | 34.0 mm (1.34") |
1/4" Pureline flare | 0.31 Cv (0.27 Kv) | 110.0 mm (4.33") | 13.5 mm (0.53") | 111.5 mm (4.39") | 93.0 mm (3.66") | 55.0 mm (2.16") | 51.0 mm (2.01") | 34.0 mm (1.34") |
3/8" PrimeLock | 1.05 Cv (0.87 Kv) | 114.5 mm (4.50") | 15.5 mm (0.61") | 114.5 mm (4.50") | 95.0 mm (3.74") | 57.2 mm (2.25") | 51.0 mm (2.01") | 34.0 mm (1.34") |
3/8" Flaretek | 1.05 Cv (0.87 Kv) | 112.0 mm (4.41") | 13.5 mm (0.53") | 111.5 mm (4.39") | 93.0 mm (3.66") | 56.0 mm (2.20") | 51.0 mm (2.01") | 34.0 mm (1.34") |
3/8" Pureline flare | 1.05 Cv (0.87 Kv) | 110.0 mm (4.33") | 13.5 mm (0.53") | 111.5 mm (4.39") | 93.0 mm (3.66") | 55.0 mm (2.17") | 51.0 mm (2.01") | 34.0 mm (1.34") |
1/2" PrimeLock | 2.81 Cv (2.32 Kv) | 134.8 mm (5.31") | 18.0 mm (0.71") | 144.2 mm (5.68") | 109.5 mm (4.31") | 67.4 mm (2.65") | 62.0 mm (2.44") | 40.0 mm (1.57") |
1/2" Flaretek | 2.81 Cv (2.32 Kv) | 129.0 mm (5.08") | 16.0 mm (0.63") | 142.2 mm (5.60") | 106.8 mm (4.21") | 64.5 mm (2.54") | 62.0 mm (2.44") | 40.0 mm (1.57") |
1/2" Pureline flare | 2.81 Cv (2.32 Kv) | 133.0 mm (5.24") | 16.0 mm (0.63") | 142.2 mm (5.60") | 106.9 mm (4.21") | 66.5 mm (2.62") | 62.0 mm (2.44") | 40.0 mm (1.57") |
3/4" PrimeLock | 5.17 Cv (4.27 Kv) | 149.4 mm (5.88") | 23.6 mm (0.93") | 153.6 mm (6.05") | 118.2 mm (4.65") | 74.8 mm (2.94") | 62.0 mm (2.44") | 40.0 mm (1.57") |
3/4" Flaretek | 5.17 Cv (4.27 Kv) | 136.0 mm (5.35") | 19.0 mm (0.75") | 149.0 mm (5.87") | 112.1 mm (4.41") | 68.0 mm (2.68") | 62.0 mm (2.44") | 40.0 mm (1.57") |
3/4" Pureline flare | 5.17 Cv (4.27 Kv) | 137.5 mm (5.41") | 19.0 mm (0.75") | 149.0 mm (5.87") | 112.1 mm (4.41") | 68.8 mm (2.71") | 62.0 mm (2.44") | 40.0 mm (1.57") |
Materials of construction | All wetted parts: | PFA, PTFE | ||
Exterior actuator parts: | PVDF, PC | |||
Interior actuator parts: | PFA (nut only), PVDF, Viton®, EPDM, PP | |||
Springs (pneumatic version only): | Coated stainless steel | |||
Pressure range | 586 kPa (85 psig) @ 21° to 90°C (70° to 194°F), fluid | |||
Temperature range | 21° to 50°C (70° to 122°F), ambient | |||
Pneumatic supply port (pneumatic version only) | 1/8" PT | |||
Pneumatic supply pressure (pneumatic version only) | 414 kPa (60 psig) minimum to 586 kPa (85 psig) maximum | |||
Successfully Opted for software Updates
Part Number | Actuator | Port 1 Connection | Port 2 Connection |
---|---|---|---|
WS04-2C-04FF | Pneumatic normally closed | 1/4" Flaretek® | 1/4" Flaretek® |
WS04-2C-04KK | Pneumatic normally closed | 1/4" PrimeLock® | 1/4" PrimeLock® |
WS04-2C-04LL | Pneumatic normally closed | 1/4" Pureline flare | 1/4" Pureline flare |
WS04-2M-04FF | Manual multi-turn | 1/4" Flaretek® | 1/4" Flaretek® |
WS04-2M-04KK | Manual multi-turn | 1/4" PrimeLock® | 1/4" PrimeLock® |
WS04-2M-04LL | Manual multi-turn | 1/4" Pureline flare | 1/4" Pureline flare |
WS06-2C-06FF | Pneumatic normally closed | 3/8" Flaretek® | 3/8" Flaretek® |
WS06-2C-06KK | Pneumatic normally closed | 3/8" PrimeLock® | 3/8" PrimeLock® |
WS06-2C-06LL | Pneumatic normally closed | 3/8" Pureline flare | 3/8" Pureline flare |
WS06-2M-06FF | Manual multi-turn | 3/8" Flaretek® | 3/8" Flaretek® |
WS06-2M-06KK | Manual multi-turn | 3/8" PrimeLock® | 3/8" PrimeLock® |
WS06-2M-06LL | Manual multi-turn | 3/8" Pureline flare | 3/8" Pureline flare |
WS08-2C-08FF | Pneumatic normally closed | 1/2" Flaretek® | 1/2" Flaretek® |
WS08-2C-08KK | Pneumatic normally closed | 1/2" PrimeLock® | 1/2" PrimeLock® |
WS08-2C-08LL | Pneumatic normally closed | 1/2" Pureline flare | 1/2" Pureline flare |
WS08-2M-08FF | Manual multi-turn | 1/2" Flaretek® | 1/2" Flaretek® |
WS08-2M-08KK | Manual multi-turn | 1/2" PrimeLock® | 1/2" PrimeLock® |
WS08-2M-08LL | Manual multi-turn | 1/2" Pureline flare | 1/2" Pureline flare |
WS12-2C-12FF | Pneumatic normally closed | 3/4" Flaretek® | 3/4" Flaretek® |
WS12-2C-12KK | Pneumatic normally closed | 3/4" PrimeLock® | 3/4" PrimeLock® |
WS12-2C-12LL | Pneumatic normally closed | 3/4" Pureline flare | 3/4" Pureline flare |
WS12-2M-12FF | Manual multi-turn | 3/4" Flaretek® | 3/4" Flaretek® |
WS12-2M-12KK | Manual multi-turn | 3/4" PrimeLock® | 3/4" PrimeLock® |
WS12-2M-12LL | Manual multi-turn | 3/4" Pureline flare | 3/4" Pureline flare |