Integra® Manual Valves, 1/2" Orifice, Sampling, Multi-turn
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- High purity corrosive chemical handling
- All semiconductor wet etch and clean (WEC) process chemicals
- Chemical line sizes 1/2" or larger
Specifications
Dimension Note:
Dimensions are the same regardless of body material (PVDF or ECTFE) or nut material (PVDF, PFA orCPFA).
Ports 1 and 3 | Ports 2 and 4 (if applicable) | A | B |
3/4" Flaretek | 1/2" Flaretek | 2.21" (56.1 mm) | 2.10" (53.3 mm) |
3/4" Flaretek | 3/4" Flaretek | 2.21" (56.1 mm) | 2.21" (56.1 mm) |
3/4" PureBond fusible pipe | 1/2" Flaretek | 2.25" (57.2 mm) | 2.10" (53.3 mm) |
3/4" PureBond fusible pipe | 3/4" Flaretek | 2.25" (57.2 mm) | 2.21" (56.1 mm) |
3/4" PureBond fusible pipe | 3/4" PureBond fusible pipe | 2.25" (57.2 mm) | 2.25" (57.2 mm) |
Note: Contact Entegris for other configurations.
Panel Mount Instructions
- Panel thickness must be within 0.12" (3.0 mm) to 0.38" (9.6 mm). The handle must be removed to panel mount.
- Place the valve fully in the closed position and remove the two screws holding the handle in place.
- Remove the handle, taking care not to disturb the position of the red indicator.
- To install the valve, remove the panel mount nut and insert the valve into the panel.
- Thread the panel mount nut onto the valve. Again, take care not to disturb the red indicator position.
- Place the handle on the valve, lining up the screw holes. Install the screws.
- After installing on panel, tighten panel mounting nut 40 inch•lbs (4.5 N•m) torque, or 1/8-turn beyond hand tight.
Note: The Ports 1 and 3 Pressure vs. Ports 2 and 4 Pressure as a Function of Media Temperature graph is not applicable for valves with ECTFE external components. Contact Entegris for more information.
Pressure range: | 29" Hg vacuum (980 mbar) to 80 psig (551.6 kPa) |
Temperature range: | 75° to 150°F (24° to 65°C), ambient 75° to 212°F (24° to 100°C), fluid 75°F (24°C) for ECTFE external components, ambient and fluid |
Materials: | All wetted parts are PFA. Exterior actuator parts are PVDF or ECTFE. Interior actuator parts are PVDF, stainless steel and Viton®. Mounting base is high density polyethylene. |
Note: Actual valve performance varies with pressure and temperature. Refer to actual ratings in performance charts.
CAUTION!
The valve port-to-port seal travel adjustment nut is set at the factory. DO NOT move the adjustment nut on the valve. If altered in the field, use the following procedure to properly reset the nut.
- Close the valve and connect 80 psig (551.6 kPa) air pressure to the outlet port.
- Remove the two white screws and remove the handle.
- Back off the red adjustment nut.
- Put the handle back on and tighten until the lead stops. Tighten an additional 1/4-turn.
- Remove the handle taking care not to disturb the red indicator position.
- Thread red adjustment nut until it stops, then back off the red adjustment nut to match hexes. Replace the handle.
- Replace the two screws.
Successfully Opted for software Updates
-
01-003406
Replacement mounting base for 1/2" orifice Integra sampling valves and custom configurations
-
201-74
Repair kit for 1/2" Integra® manual multi-turn, or sampling valves.
-
213-103-01
Tool kit for all 1/2" Integra® sampling or 2-way valves except D8 high pressure valves.
Part Number | Ports 1 & 3 Connection | Port 2 (Sample Port) Connection | Port 4 (Sample Port) Connection | Options |
---|---|---|---|---|
MA8-3M-01-EC | 3/4" PureBond® pipe | 3/4" PureBond® pipe | N/A | ECTFE actuator |
MA8-3M-02-3 | 3/4" PureBond® pipe | 3/4" Flaretek® | N/A | PFA Flaretek® nut |
MA8-3M-02-6 | 3/4" PureBond® pipe | 3/4" Flaretek® | N/A | CPFA Flaretek® nut |
MA8-3M-02-EC | 3/4" PureBond® pipe | 3/4" Flaretek® | N/A | ECTFE actuator with PFA nut |
MA8-3M-03-3 | 3/4" PureBond® pipe | 1/2" Flaretek® | N/A | PFA Flaretek® nut |
MA8-3M-03-6 | 3/4" PureBond® pipe | 1/2" Flaretek® | N/A | CPFA Flaretek® nut |
MA8-3M-03-EC | 3/4" PureBond® pipe | 1/2" Flaretek® | N/A | ECTFE actuator with PFA nut |
MA8-3M-04-6 | 3/4" Flaretek® | 3/4" Flaretek® | N/A | CPFA Flaretek® nut |
MA8-3M-04-EC | 3/4" Flaretek® | 3/4" Flaretek® | N/A | ECTFE actuator with PFA nut |
MA8-3M-06-6 | 3/4" Flaretek® | 1/2" Flaretek® | N/A | CPFA Flaretek® nut |
MA8-3M-06-EC | 3/4" Flaretek® | 1/2" Flaretek® | N/A | ECTFE actuator with PFA nut |
MA8-4M-01-3 | 3/4" PureBond® pipe | 3/4" Flaretek® | 3/4" Flaretek® | PFA Flaretek® nut |
MA8-4M-01-6 | 3/4" PureBond® pipe | 3/4" Flaretek® | 3/4" Flaretek® | CPFA Flaretek® nut |
MA8-4M-01-EC | 3/4" PureBond® pipe | 3/4" Flaretek® | 3/4" Flaretek® | ECTFE actuator with PFA nut |
MA8-4M-02-3 | 3/4" PureBond® pipe | 1/2" Flaretek® | 1/2" Flaretek® | PFA Flaretek® nut |
MA8-4M-02-6 | 3/4" PureBond® pipe | 1/2" Flaretek® | 1/2" Flaretek® | CPFA Flaretek® nut |
MA8-4M-02-EC | 3/4" PureBond® pipe | 1/2" Flaretek® | 1/2" Flaretek® | ECTFE actuator with PFA nut |
MA8-4M-03-6 | 3/4" Flaretek® | 3/4" Flaretek® | 3/4" Flaretek® | CPFA Flaretek® nut |
MA8-4M-03-EC | 3/4" Flaretek® | 3/4" Flaretek® | 3/4" Flaretek® | ECTFE actuator with PFA nut |
MA8-4M-04-6 | 3/4" Flaretek® | 1/2" Flaretek® | 1/2" Flaretek® | CPFA Flaretek® nut |
MA8-4M-04-EC | 3/4" Flaretek® | 1/2" Flaretek® | 1/2" Flaretek® | ECTFE actuator with PFA nut |