SV Series Stack Valves, Pneumatic, 3-way
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- CMP for Semiconductor and Flat Panel Display applications
- Bulk chemical delivery for Semiconductor, LED and Flat Panel Display applications
- Lithography for Semiconductor and LED applications
- Substrate and media polishing and cleaning for Data Storage applications
Specifications
Part Number | Orifice | Flow Factor CV | Flow Factor KV | Port Connection |
SV6-3C-6F* | 3/8" | 0.81 | 11.60 | 3/8" Flaretek |
SV8-3C-8F* | 1/2" | 2.10 | 30.00 | 1/2" Flaretek |
Dimension Note: * = (PVDF), -3 (PFA) or -6 (CPFA) nuts
Part Number | Dimensions | ||||||||||||
A | B | C | D | E | F | G | H | J | K | L | M | N | |
SV6-3C-6F* | 3.76" (95.5 mm) | 1.15" (29.2 mm) | 3.65" (92.7 mm) | 1.84" (46.7 mm) | 0.96" (24.4 mm) | 1.00" (25.4 mm) | 1.28" (32.5 mm) | 1.20" (30.5 mm) | 0.60" (15.2 mm) | 0.50" (12.7 mm) | 1.59" (40.4 mm) | 0.13" (3.3 mm) | 1.37" (34.8 mm) |
SV8-3C-8F* | 4.63" (117.6 mm) | 1.62" (41.1 mm) | 4.65" (118.1 mm) | 2.17" (55.1 mm) | 1.10" (27.9 mm) | 1.17" (29.7 mm) | 1.92" (48.8 mm) | 1.38" (35.1 mm) | 0.45" (11.4 mm) | 0.59" (15.0 mm) | 1.89" (48.0 mm) | 0.14" (3.6 mm) | 1.75" (44.4 mm) |
Operating pressure range: | 0 to 80 psig (552 kPa) at 70°F (21°C) media temperature, all ports 0 to 40 psig (276 kPa) at 212°F (100°C) media temperature, all ports |
Pneumatic supply pressure: | 65 psig (448 kPa) minimum to 80 psig (552 kPa) maximum |
Temperature range: | 70° to 100°F (21° to 38°C), ambient 70° to 212°F (21° to 100°C), fluid |
Pneumatic supply port: | 1/8" FNPT |
Materials: | All wetted parts are PTFE and PFA. Exterior parts are PTFE, PVDF and polyethylene. Interior parts are PVDF, Viton® and stainless steel. |
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Part Number | Port Connection | Nut Option |
---|---|---|
SV6-3C-6F | 3/8" Flaretek® | PVDF Flaretek® nut |
SV6-3C-6F-3 | 3/8" Flaretek® | PFA Flaretek® nut |
SV6-3C-6F-6 | 3/8" Flaretek® | CPFA Flaretek® nut |
SV8-3C-8F | 1/2" Flaretek® | PVDF Flaretek® nut |
SV8-3C-8F-3 | 1/2" Flaretek® | PFA Flaretek® nut |
SV8-3C-8F-6 | 1/2" Flaretek® | CPFA Flaretek® nut |