MaxMT™ Chemical Dispense System
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Applications
- Photoresist/color resist
- Low-viscosity material for microelectronics applications
- Other liquid material coating markets
- The system integrates with the production tools and is designed for use with 10- to 40-liter NOWPak® liner-based canister systems and closures
Specifications
|
CONTROL BOX |
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| Requirements | Power | 24 VDC, minimum of 1 amp service |
| Pressure | 551.6 kPa (80 psig) high-purity nitrogen required (grade 5.0 or higher) | |
| Connections | Power | 24 VDC, 3-wire female power cable with loose leads for customer interface, 1.8 m (6 ft) cable included |
| Empty detect signal for tool interface | 3-wire, 6-contact male connector with loose leads for customer interface, 1.8 m (6 ft) cable included | |
| Nitrogen supply | 8 mm diameter tube connection (tubing for nitrogen supply not included) | |
| Materials of construction (non-wetted) | Enclosure | Stainless steel |
| Window | PTFE coated polycarbonate | |
| Start and stop buttons, on/off switch, emergency stop (EMO) button | Polyester | |
| Labels | Aluminum | |
| Air fittings | Stainless steel | |
| Empty detect signal cable | Polypropylene | |
| Power cable | Polypropylene | |
| Exhaust muffler | Polyethylene, polyacetal | |
| Tubing/wire distance between control box and connectors | 1.8 m (6 ft) | |
| Weight | 10.6 kg (23.3 lbs) | |
|
CONNECTOR |
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| Connections | Level sensor cable | 4-contact pin cable to connect to the control box, 1.8 m (6 ft) length included |
| Empty detect sensor cable | 4-contact pin cable to connect to the control box, 1.8 m (6 ft) cable included | |
| Headspace gas removal valve actuation | 4 mm tubing to connect to the control box, 1.8 m (6 ft) cable included | |
| Liquid out valve actuation | 6 mm tubing to connect to the control box, 1.8 m (6 ft) cable included | |
| Canister pressurization | 8 mm tubing to connect to the control box, 1.8 m (6 ft) cable included | |
| Headspace gas removal valve to drain | 3 mm (0.13") PFA tubing, 1.8 m (6 ft) length included | |
| Connector probe fluid path diameter | 6.35 mm (0.25") minimum diameter | |
| Liquid out valve diameter | 4 mm with a 1.2 mm fixed orifice restriction | |
| Headspace gas removal valve diameter | 2 mm with a 1 mm fixed orifice restriction | |
| Liquid out valve to manual valve assembly | 6 mm PFA tubing, 1.8 m (6 ft) length included | |
| Manual valve assembly | 2 pcs, 6 mm PFA tee fittings and manual valve assembly | |
| Thread type | 2-1/4 ACME double start | |
| Performance | Operating pressure | 206.8 kPa (30.0 psig) maximum |
| Customers should consult local operating pressure regulations as regulations vary from region to region. For example, in the U.S., the pressure regulation is 103.4 kPa (15.0 psig) maximum. | ||
| Connector pressure relief valve | 241.3 kPa (35.0 psig) nominal cracking pressure | |
| Fluid temperature | 25°C (77°F) | |
| Materials of construction (wetted) | Probe/reservoir | PTFE |
| Reservoir nozzle/filter | PTFE | |
| Reservoir plug | PTFE | |
| Reservoir O-ring | Chemraz® | |
| Headspace gas removal valve | PFA | |
| Liquid out valve | PFA | |
| Fixed orifices | PTFE | |
| Probe O-rings | Kalrez® | |
| Elbow fitting | PFA | |
| Pressure transducer | PTFE with a PFA cable sleeve | |
| 3 mm headspace gas removal drain tubing | PFA | |
| 6 mm liquid out valve tubing | PFA | |
| Manual assembly tee | PFA | |
| Manual assembly valve | PFA | |
| Materials of construction (non-wetted) | Screws | Stainless steel |
| Lock washers | Stainless steel | |
| Cover | Anodized aluminum | |
| Connecting rods | Anodized aluminum | |
| Level sensor cable | PE with a PFA cable sleeve | |
| Mounting pins | Stainless steel | |
| Dowel pins | Stainless steel | |
| Base | Anodized aluminum | |
| Gas inlet fitting | Stainless steel and polypropylene | |
| Pressure relief valve | Stainless steel and Viton® | |
| Bushing | PTFE | |
| Retainer gasket | EPDM | |
| Retainer | Natural polypropylene | |
| Retainer O-ring | EPDM | |
| Collar | Anodized aluminum | |
| Red 4 mm tubing | Polyurethane | |
| Red 6 mm tubing | Polyurethane | |
| Red 8 mm tubing | Polyurethane | |
| Blue 4 mm tubing | Polyurethane | |
| Blue 6 mm tubing | Polyurethane | |
| Blue 8 mm tubing | Polyurethane | |
| Cable sleeve | PET | |
| Weight | 2.81 kg (6.2 lbs) | |
| Manufacturing standards | Fabricated and tested in a Class 5 clean room as per International Standard ISO 14644-1:* cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness. Connectors are 100% pressure decay tested using high-purity nitrogen. | |
| Cleanliness | Connector is to be free from lubricants and other foreign materials consistent with Entegris' processes and procedures. | |
| Packaging | The control box has two foam end protectors and is shipped in a corrugated shipping carton. Each connector is double bagged with a PE inner bag that is cleanroom processed and heat sealed, and a PE outer bag that is heat sealed. The connectors are packaged with foam on all sides and shipped in a corrugated shipping carton. | |
| Labeling | For traceability, each control box has a serial number located inside the control box | |
| For traceability, each connector is labeled with the part number and serial number | ||
| * ISO standard certification is kept up to date as necessary to remain current and effective to be able to demonstrate compliance with up-to-date ISO requirements. | ||
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Part Numbers
| Part Number | Product Type |
|---|---|
| EDA-B | MaxMT™ connector bracket |
| EDA-D | Gas cleaning fixture for MaxMT™ system connector |
| EDA-E | Solvent cleaning fixture for MaxMT™ system connector |
| EDA-G | In/out extension cable kit |
| EDA-V | MaxMT™ valve replacement kit |
| ND-ED-CB-2 | MaxMT™ control box |
| ND-ED-CN-1 | MaxMT™ dispense connector |
| ND-ED-S-2 | MaxMT™ chemical dispense system (one control box and two connectors) |
| PA-06 | Probe O-rings, Kalrez®, 2 pc |
| PA-08 | Retainer O-rings, EPDM, 10 pc |