Rectangular 150 mm Dual Capacity Process Tanks (6.1 Gallons)
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Note: Minimum order quantities apply. For MOQs please contact Entegris.
Note: For heated applications, the bottom and sides of the tank must be fully supported such that the tank itself is not bearing the weight of the tank contents or associated components. The tank support structure must minimize deformation of the tank bottom and sidewalls that could occur in heated applications.
Our dual capacity tank enables you to process twice as many 150 mm cassettes in half the time. Ideal for:
- Semiconductor wet processing applications
- Life Sciences fine chemicals and bioprocessing applications
Specifications
Part Number | A Top Inside Length × Width | B Bottom Inside Length × Width | C Depth | D Mounting Hole Length × Width |
E92-01-0215 | 16.0" (406 mm) × 8.0" (203 mm) | 14.8" (376 mm) × 6.8" (173 mm) | 11.0" (279 mm) | 16.5" (419 mm) × 8.5" (216 mm) |
E92-01D-0215 | 16.0" (406 mm) × 8.0" (203 mm) | 14.8" (376 mm) × 6.8" (173 mm) | 11.0" (279 mm) | 16.5" (419 mm) × 8.5" (216 mm) |
Part Number | Material | Drain | Volume |
E92-01-0215 | PFA | No drain | 6.1 gal. (23 l) |
E92-01D-0215 | PFA | 1/2" FNPT drain | 6.1 gal. (23 l) |
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Part Number | Type |
---|---|
E92-01D-0215 | Tank with drain |
Note: Minimum order quantities apply. For MOQs please contact Entegris.