IntelliGen® HV20 Dispense System
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Applications
- High-viscosity (1,000 - 20,000 cP) POU photochemical dispense
Specifications
User-friendly confirmation tools:
- Dispense pressure profile compare (%)
- Dispense air detect volume (mL)
- Filtration averagel delta pressure (psi)
- Maximum fill pressure (psi)
- Total cycle time (sec)
| Materials | Wetted surfaces | PTFE, modified PTFE, Kalrez® |
| Dispense performance |
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| Volume | 0.1–20.0 mL in 0.001 mL increments | |
| Dispense rate | 0.1–3.0 mL/sec in 0.01 mL/sec increments | |
| Repeatability | <0.03 mL 3 sigma | |
| Viscosity range* | 1,000–20,000 cP | |
| Maximum dispense design pressure** | 1.7 MPa (250 psi) | |
| Recharge performance |
Fill, filtration, vent, and purge rates | 0.1–3.0 mL/sec in 0.01 mL/sec increments |
| Vent frequency | Auto venting or 1–10,000 dispense cycles | |
| Mechanical | Inlet, outlet, vent connections | 3/8" (9.53 mm) interchangeable Super Type Pillar® fitting |
| Filter | Optimizer® ST filter | |
| Inlet gas type | Regulated N2 or CDA | |
| Inlet gas pressure | 0.41 - 0.45 MPa (60 - 65 psid) | |
| Vacuum | - 68 kPa (20” Hg) | |
| Electrical | Current rating | 1.75 amp |
| Input voltage (system) | 24 VDC, 1.75 amp | |
| Serial communication | Dependent on interface module | |
| Parallel communication | Triggers and acknowledgments | |
| Dimensions | Height Width Depth |
354.2 mm (13.95") 115.0 mm (4.53") 328.3 mm (12.92") |
| Weight | ~17.0 kg (37.5 lbs) | |
| Certifications | CE | |
| Environments (indoor use only) |
Altitude Ambient temperature*** |
<2,000 m 5° to 40°C (41° to 104°F) |
| *The pump is not limited to this viscosity range unless the dispense pressure goes beyond 250 psi. **Maximum pressure is a limit on the window of operation. ***Dependent on tool. Proper ventilation may be needed to keep the temperature consistent. |
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Successfully Opted for software Updates
Published Aug 1, 2018
Application Note
Monitoring Air Supply in Spin Coating Photolithography Process
1.2 MB
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IGHVINT02
Interface module box for D-Sub 25 pin HV20 pump head
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IGHVSP07
IntelliGen® HV external stop valve, 3/8" inlet to 1/4" outlet
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IGHVSP18
IntelliGen® HV external stop valve, 3/8" inlet to 3/8" outlet
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AWAA0LKM1
Impact® HV OF filter, 1.0 µm retention rating, Kalrez® O-ring
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IGMINISP28
RS422 - RS232C K2 converter
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IGMP12HOR02
Multipurpose interface V-2 for D-Sub 15 pin HV20 pump head
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ENCOMTC00
Encompass® dispense system trigger cable
| Part Number | Fitting Type | Cable Length | Connector | Fitting Configuration |
|---|---|---|---|---|
| IGHV20PHBP3 | 3/8" Super Type Pillar® | 1.2 m | RDS01 connector | Straight |
| IGHV20PHKP3 | 3/8" Super Type Pillar® | 1.0 m | D-Sub 25 pin | Straight |
| IGHV20PHLP3 | 3/8" Super Type Pillar® | 3.0 m | D-Sub 15 pin | Straight |
| IGHV20PKPL3 | 3/8" Super Type Pillar® | 2.0 m | D-Sub 25 pin | Elbow |