IntelliGen® RULV Dispense Systems

Built-in RDS-01 V2 control module with optional flowmeter enables the monitoring of dispense liquid volume accuracy and repeatability. The leading-edge, two-stage system with built-in dual PT sensors enables independent dispense and filtration, and also achieves defect reduction in low-viscosity fluids.

Most features are the same as those of the IntelliGen ULV system with a newly added capability to detect accuracy and repeatability of dispensed liquid volume using a flowmeter
Designed exclusively for use with Tokyo Electron ACT™ 12/ACT 8 tools
Low -viscosity fluid dispense with 1 - 100 cP, or at higher viscosity when dispense pressure does not exceed 29 psig
Reliable dispense of low-viscosity fluid (1-100 cP) without sacrificing filtration performance
New user-friendly MMI software simplifies recipe programming and provides real-time status
Real time robust confirmation tools help minimize costly wafer defects
Optimized fluid flow path provides better chemical turnover and reduced dead volume
Improved dispense feature prevents motor backlash enabling more consistent dispense
Optional flowmeter allows the added advantage of monitoring flow characteristics and more sensitive detection of air bubbles, leaks, or kinks in the outlet tube
Optional post-cleaning procedure is available to help achieve faster start-up of wafer run

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NOTES:

The RDS-01 V2 controller is built into the IntelliGen RULV dispense system and does not need to be ordered separate from the IntelliGen RULV dispense system.
If ordering the optional flowmeter, you also need to order an RS485 flowmeter cable.

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Applications IntelliGen® RULV Dispense Systems Applications

The advanced two-stage system builds on the proven performance of dispense technology combined with Connectology filter design to provide dispense accuracy and repeatability in:

Ultra-low viscosity (1-100 cP) point-of-use photochemical dispense

Specifications

Drawings

Performance Data

Product Specifications

Dispense performance:	Volume	0.01 – 10.0 mL in 0.001 mL increments
	Rate	0.1 – 3.0 mL/sec in 0.001 mL/sec increments
	Repeatability	≤ 0.02 mL 3 sigma
	Viscosity range*	1 – 100 cP
	Maximum dispense design pressure**	0.21 MPa (30 psi)
Recharge performance:	Fill rate, filtration rate, vent rate, purge rate	0.1 – 3.0 mL/sec in 0.001 mL/sec increments
Recharge performance:	Vent frequency	Auto-venting or 1–10,000 dispense cycles
Mechanical:	Wetted surfaces	Modified PTFE, PTFE, Kalrez^®
	Connection type	Inlet: Insert style, Super Type Pillar^® Outlet and vent: Flaretek^®
	Filter	Impact^® 8G or Impact 2 V2 (OF style)
	Inlet, outlet and vent tubing	OD: 6.35 mm (0.25”) or 6.0 mm (0.24”) ID: 3.97 mm (0.15628”) or 4.0 mm (0.16”)
	Inlet gas type	Regulated N₂ or CAD
	Operating conditions	Minimium operating pneumatic pressure: 0.26 MPa (38 psi) Maximum operating pneumatic pressure: 0.28 MPa (40 psi) Pneumatic leak pressure: 0.30 MPa (43 psi)
	Vacuum	-68 kPa (20 in -Hg min.)
Dimensions:	Height	303.5 mm (11.95”)
	Width	118.0 mm (4.65")
	Depth	156.8 mm (6.17")
Weight:	Approximately 4.5 kg (10 lb)
Electrical:	Current rating	1.25A maximum
	Input voltage (system)	24 VDC ±10%
	Serial communication	Specifications are dependent on interface module use
	Parallel communication	Triggers and acknowledgments
Certifications:	See provided documentation
Environment:	Indoor use only
	Altitude below 2000 m (2187.22 yd)
	Ambient temperature 5°C – 40°C (41°F –104°F)
	Maximum relative humidity 80% for temperatures up to 31°C (88°F) decreasing linearly to 50% relative humidity at 40°C (104°F)
	Mains supply fluctuations from 22 – 26 VDC
	Transient overvoltages of overvoltage category II
	Pollution degree 2

* Depends on tool configuration. Contact applications support for detailed window of operation.
** Maximum pressure is a limit on the Window of Operation. Actual volumes and rates may be restricted to comply with the pressure limits for a given viscosity, tubing diameter, tubing length and tubing height.

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Jun 7, 2019 Data Sheet IntelliGen® RULV Dispense System

1.6 MB

Published Jul 1, 2021 Brochure Chasing the Perfect Pattern

1.4 MB

Part Numbers

IntelliGen® RULV Dispense Systems Part Numbers

Part Number	Product Type	Cable Length	Cable Type
IGLFMHM01	Flowmeter, type 1 OD 6.35 mm	N/A	N/A
IGLNPSP01	Cable	3.5 m	RS232C host cable
IGLNPSP02	Cable	5.0 cm	RS232C host cable
IGLNPSP03	Cable	3.5 m	RS422 host cable plus ground
IGLNPSP04	Cable	1.0 m	RS422 DG chain cable plus ground
IGLNPSP05	Cable	2.0 m	RS485 flowmeter cable
IGLNPSP06	Cable	5.0 m	RS485 flowmeter cable
IGLNPVBPF1F1	IntelliGen® RULV dispense system	N/A	N/A
IGRDS01SP01	Cable	3.0 m	RDS-01 controller, main
IGRDS01SP02	Cable	0.80 m	RDS-01 controller, chain

NOTES:

The RDS-01 V2 controller is built into the IntelliGen RULV dispense system and does not need to be ordered separate from the IntelliGen RULV dispense system.
If ordering the optional flowmeter, you also need to order an RS485 flowmeter cable.