Wafergard® IV HF Mini In-line Gas Filters

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These alloy-22 membrane filters offer superior particulate filtration for ultrapure and corrosive gas systems.

The alloy-22 membrane (commonly referred to by the brand name HASTELLOY^® C-22^® alloy) offers the most inert and reactive gas compatibility in our Wafergard^® product line
Capable of filtering carbon monoxide, hydrogen bromide, chlorine, and other corrosive gases
The clean, all-metal construction is ideal for high-temperature and dynamic-pressure applications
State-of-the-art housing assembly eliminates outgassing by minimizing the weld area

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Alloy-22 filters are not recommended for use with O₃ gases.

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Applications Wafergard® IV HF Mini In-line Gas Filters Applications

Ultrapure gas lines
High-temperature applications
Dynamic-pressure applications
New fab construction
Corrosive gases

*Not recommended for use with O₃ gases.

Specifications

Drawings

Performance Data

Product Specifications

Materials	Filter element	Sintered alloy-22 membrane
Materials	Housing	Electropolished VAR 316L stainless steel
Downstream cleanliness	<0.03 particles/liter (<1 particle/ft³) >0.01 µm at specified flow
Removal rating	≥0.0015 µm
Surface finish interior	≤5 µin Ra
Helium leak rating	Qualified	2 × 10^-10 atm cc/sec
	Tested	1 × 10^-9 atm cc/sec
Operating conditions	Maximum inlet pressure	17.2 MPa (2500 psig) @ 20°C (68°F)
	Maximum forward/reverse differential pressure	0.8 MPa (120 psid) @ 20°C (68°F)
	Maximum operating temperature	450°C (842°F) - inert gases
Warranty	5 year
Particle retention	Greater than 99.9999999% (9 LRV) removal of all particles; referenced at the most penetrating particle size
Flow rating	Refer to performance data

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Reference Materials Product Documentation

Published Jun 11, 2025 Data Sheet Wafergard® IV HF Mini In-line Gas Filters

238.3 kB

Published Jun 11, 2025 Data Sheet Wafergard® IV HF Mini In-line Gas Filters - A4

238.3 kB

Published Nov 2, 2020 Manual and Guide Wafergard® Gas Filter Compatibility Guide

102.3 kB

Part Numbers

Wafergard® IV HF Mini In-line Gas Filters Part Numbers

Part Number	Fitting Size and Type	Length
WGL045HS3R2	1/4" Gasket seal (compatible with VCR fitting) male inlet/outlet	84.1 mm (3.31")
WGL045HS3R4	1/2" Gasket seal (compatible with VCR fitting) male inlet/outlet	84.1 mm (3.31")

Alloy-22 filters are not recommended for use with O₃ gases.