Sign In
Sign In

Please enter a valid email address in the field above Please enter your password in the field above.
- Forgot Password?
- Request an Account
Forgot Password?

Please enter the email address for your account. A link to change your password will be emailed to you.
All Fields Required

Email:

Please enter an email address in the field above

Cancel
Sign Out
My Account
Quick Order Pad
Enter Part Numbers below to add them to your cart

Need to order more than 3 items?
Go to the Quick Order Page
Part Number Qty
Product Not Found. Please remove or try a different part number.

The Minimum Order Quantity for this item is1
Product Not Found. Please remove or try a different part number.

The Minimum Order Quantity for this item is1
Product Not Found. Please remove or try a different part number.

The Minimum Order Quantity for this item is1
Please correct any errors above before adding to cart.
Quick Order Pad
Contact Us
Cart
Language
Choose Language
- English
- 日本語
Currency
Choose Currency
- CNY ¥
- EUR €
- GBP £
- ILS ₪
- JPY ¥
- KRW ₩
- SGD $
- TWD NT$
- USD $

Wafergard® III Bulk In-line Metal Gas Filters

Entegris’ complete line of all-metal high-flow filtration products satisfies the concerns and needs to supply particle-free process gas at the point of delivery.

Available with nickel filtration membranes for all process gases
Comes in a variety of fitting types to meet our customers’ installation requirements
Available with 0.003 µm filtration technology to meet the most demanding needs of ultra-clean bulk gas delivery

Read More Read Less

Specify Your Part

Maximum Flow Rate

Max Operating Pressure

Fitting Size & Type

Length

Part Number:

Interested in an Entegris Product?

To discuss your specific needs, contact your local Entegris representative.

Don't have an Entegris representative?

Request a Quote

Please fill out the form below and someone will contact you shortly. Have an account? Sign In

* Required

First Name:

Please enter a first name

Last Name:

Please enter a last name

Country:

Please select a country

Email Address:

Please enter a valid email

Phone Number:

Please enter a valid phone number.

Company:

Please enter your company.

(Optional) Comments

You are required to accept the Captcha.

An error occurred while submitting your quote request. Please try again.

Cancel

Quote Requested

Thank you for requesting a quote. Someone from Entegris will contact you shortly.

Your quote number is {0}.

Top of page

CAD CAD Symbols

CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.

Go to Part Selector

Applications Wafergard® III Bulk In-line Metal Gas Filters Applications

Bulk Gas Delivery
Photolithography
Deposition
Dry Etch
Ion Implantation

Specifications

Drawings

Performance Data

Successfully Opted for software Updates

Reference Materials Product Documentation

Published May 1, 2019 Data Sheet Wafergard® Bulk In-line Metal Gas Filters

242.6 kB

Published Nov 1, 2020 Manual and Guide Wafergard® Gas Filter Compatibility Guide

102.3 kB

Part Numbers

Wafergard® III Bulk In-line Metal Gas Filters Part Numbers

Part Number	Maximum Flow Rate	Max Operating Pressure	Fitting Size & Type	Length
SI2N0010R	300 slpm	5 MPa (725 psig)	10 CFM, 1/2" VCR male	213 mm (8.40")
SI2N0010RV	300 slpm	5 MPa (725 psig)	10 CFM, 1/2" VCR male. V=ultra high purity	213 mm (8.40")
SI2N0025R	750 slpm	5 MPa (725 psig)	25 CFM, 1/2" VCR male	305 mm (12.00")
SI2N0025RV	750 slpm	5 MPa (725 psig)	25 CFM, 1/2" VCR male. V=ultra high purity	305 mm (12.00")
SI2N0050R	1500 slpm	5 MPa (725 psig)	50 CFM, 3/4" VCR male	213 mm (8.40")
SI2N0100B	3000 slpm	3.1 MPa (450 psig)	100 CFM, Butt weld tube	267 mm (10.50")
SI2N0200B	6000 slpm	3.1 MPa (450 psig)	200 CFM, 1 1/2" Butt weld tube	366 mm (14.41")