Wafergard® III Bulk In-line Metal Gas Filters
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Applications
- Bulk gas farm and Bulk Special Gas System (BSGS)
- Ultra-high purity gas lines
- High-temperature applications
- New fab construction and /or upgrade existing filters
Specifications
| Part number | Fitting configuration | D1 | D2 | L1 | L2 |
| SI2N0010R | VCR male | – | 38.1 mm (1.50") | 213 mm (8.4") | 35.9 mm (1.41") |
| SI2N0010RV | VCR male | – | 38.1 mm (1.50") | 213 mm (8.4") | 35.9 mm (1.41") |
| SI2N0025R | VCR male | – | 38.1 mm (1.50") | 305 mm(12.0") | 35.9 mm (1.41") |
| SI2N0025RV | VCR male | – | 38.1 mm (1.50") | 305 mm(12.0") | 35.9 mm (1.41") |
| SI2N0050R | VCR male | – | 76.2 mm (3.00") | 213 mm (8.4") | 35.2 mm (1.39") |
| SI2N0050RV | VCR male | – | 76.2 mm (3.00") | 213 mm (8.4") | 35.2 mm (1.39") |
| SI2N0050R4 | VCR male | – | 76.2 mm (3.00") | 225 mm (8.86") | 30.2 mm (1.19") |
| SI2N0100B | Butt weld | 25.4 mm (1.00" | 101.6 mm (4.00") | 267 mm (10.5") | 57.2 mm (2.25") |
| SI2N0100BRR6 | VCR male | – | 101.6 mm (4.00") | 384 mm (15.1") | 115.85 mm(4.56") |
| SI2N0100BRR8 | VCR male | – | 101.6 mm (4.00") | 384 mm (15.1") | 115.85 mm(4.56") |
| SI2N0200B | Butt weld | 38.1 mm (1.50") | 101.6 mm (4.00") | 356 mm (14.0") | 57.2 mm (2.25") |
| SI2N0200B16 | Butt weld | 50.8 mm (2.00") | 101.6 mm (4.00") | 356 mm (14.0") | 52.1 mm (2.05") |
| SI2N0200R | VCR male | – | 101.6 mm (4.00") | 354 mm (13.9") | 56.4 mm (2.22") |
| SI2N0400B | Butt weld | 50.8 mm (2.00") | 152.4 mm (6.00") | 358 mm (14.1") | 51.9 mm (2.05" |
| SI2N0200A1007 | ANSI 150 RF flange | – | 101.6 mm (4.00") | 356 mm (14.0") | 44.5 mm (1.75") |
| SI2N0200A1015 | ANSI 150 RF flange | – | 101.6 mm (4.00") | 356 mm (14.0") | 39.7 mm (1.56") |
| SI2N0200A1020 | ANSI 150 RF flange | – | 101.6 mm (4.00") | 356 mm (14.0") | 38.5 mm (1.52") |
| SI2N0200J1015 | JIS 10K RF flange | – | 101.6 mm (4.00") | 356 mm (14.0") | 41.7 mm (1.64") |
| SI2N0400A1030 | ANSI 150 RF flange | – | 152.4 mm (6.00") | 358 mm (14.1") | 28.2 mm (1.11") |
| Materials | Filter element | Sintered nickel membrane filter |
| Housing | Electropolished VAR 316L stainless steel | |
| Removal rating | 0.0015 µm | |
| Surface finish interior | <10 µin Ra | |
| Downstream cleanliness | <0.03 particles/liter (<1 particle/ft3) >0.01 µm | |
| Helium leak rating | 1 x 10-9 atm cc/sec | |
| Maximum operating conditions | Maximum operating pressure: | 50 bar (725 psig) SI2N0010R, SI2N0025R |
| 31 bar (450 psig) SI2N0050R, SIN0100B, SI2N0200B, SI2N0200R | ||
| Maximum forward/reverse differential pressure: | 5.2 bar (75 psid) | |
| Maximum operating temperature in inert gases: | 200°C (392°F) | |
| Particle retention | Greater than 99.9999999% (9 LRV) removal of all particles at maximum rated flow (referenced at the most penetrating particle size) | |
Successfully Opted for software Updates
Part Numbers
| Part Number | Fitting Size and Type | Length |
|---|---|---|
| SI2N0010R | 10 CFM, 1/2" VCR male | 213 mm (8.40") |
| SI2N0010RV | 10 CFM, 1/2" VCR male. V=ultra high purity | 213 mm (8.40") |
| SI2N0025R | 25 CFM, 1/2" VCR male | 305 mm (12.00") |
| SI2N0025RV | 25 CFM, 1/2" VCR male. V=ultra high purity | 305 mm (12.00") |
| SI2N0050R | 50 CFM, 3/4" VCR male | 213 mm (8.40") |
| SI2N0050RV | 50 CFM, 3/4" VCR male. V=ultra high purity | 213 mm (8.40") |
| SI2N0100B | 100 CFM, Butt weld tube | 267 mm (10.50") |
| SI2N0100BRR8 | — | 384 mm (15.1") |
| SI2N0200A1007 | 200 CFM, 3/4" ANSI 150 RF flange | 356 mm (14.0") |
| SI2N0200A1015 | 200 CFM, 1 1/2" ANSI 150 RF flange | 356 mm (14.0") |
| SI2N0200A1020 | 200 CFM, 2" ANSI 150 RF flange | 356 mm (14.0") |
| SI2N0200B | 200 CFM, 1 1/2" Butt weld tube | 356 mm (14.0") |
| SI2N0200B16 | 200 CFM, 2" butt weld tube | 356 mm (14.0") |
| SI2N0200J1015 | 200 CFM, 40A JIS 10K RF flange | 356 mm (14.0") |
| SI2N0400A1030 | 400 CFM, 3" ANSI 150 RF flange | 358 mm (14.1") |
| SI2N0400B | 400 CFM, 2" butt weld tube | 358 mm (14.1") |