Wafergard® III NF-100 In-line Gas Filters

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These nickel membrane filters are the cleanest, most efficient all-metal filters available for ultrapure gas system filtration.

The nickel membrane offers superior corrosion resistance and excellent compatibility in inert and reactive gas applications with flows up to 100 slpm
The clean, all-metal construction is ideal for high-temperature and dynamic-pressure applications
Provides excellent chemical compatibility and can be used with a wide range of chemistries
State-of-the-art housing assembly eliminates outgassing, reduces drydown times, and does not contribute contamination

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Nickel filters are not recommended for use with CO₂, O₃, and low-level hydride dopant gases.

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Applications Wafergard® III NF-100 In-line Gas Filters Applications

Ultrapure inert and reactive gas lines
High-temperature applications
Dynamic-pressure applications
New fab construction

Specifications

Drawings

Performance Data

Product Specifications

Materials	Filter element	Patented, sintered nickel membrane
	Housing	Two housing options available 1. Electropolished 316L semi F20 stainless steel (NS) 2. A22 (NH)
Downstream cleanliness	Particles^*	<0.03 particles/liter (<1 particle/ft³)
Standard downstream cleanliness	<0.03 particles/liter (<1 particle/ft³) >0.01 µm at specified flow
Removal rating	≥0.0015 µm
Helium leak rating	Qualified	2 x 10^-10 atm cc/sec
	Tested	1 x 10^-9 atm cc/sec
Operating conditions	Maximum inlet pressure	50 barg (725 psig)
	Maximum forward/reverse differential pressure	5.2 bar (75 psid)
	Maximum operating temperature:	Insert gases:	400°C (725°F)
		Corrosive and reactive gases:	Gas type and condition dependent**
Particle retention	Greater than 99.9999999% (9 LRV) removal of all particles at 100 slpm
* Particle cleanliness qualified following SEMASPEC Test Method for Particle Shedding (#93021511A-STD). ** Contact your Entegris Account Manager for specific details.

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Reference Materials Product Documentation

Published Sep 1, 2025 Data Sheet Wafergard® III NF-100 In-line Gas Filter

274.7 kB

Published Nov 2, 2020 Manual and Guide Wafergard® Gas Filter Compatibility Guide

102.3 kB

Part Numbers

Wafergard® III NF-100 In-line Gas Filters Part Numbers

Part Number	Fitting Size and Type	Length	Housing Type
WGL100NH3R2	1/4" Gasket seal (compatible with VCR fitting) male inlet/outlet	84.1 mm (3.31")	A22
WGL100NS3R2	1/4" Gasket seal (compatible with VCR fitting) male inlet/outlet	84.1 mm (3.31")	Electropolished 316 L semi F20 stainless steel

Nickel filters are not recommended for use with CO₂, O₃, and low-level hydride dopant gases.