Wafergard® III NF-100 In-line Gas Filters
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Nickel filters are not recommended for use with CO2, O3, and low-level hydride dopant gases.
- Ultrapure inert and reactive gas lines
- High-temperature applications
- Dynamic-pressure applications
- New fab construction
Specifications
Materials | Filter element | Patented, sintered nickel membrane | |
Housing |
Two housing options available 1. Electropolished 316L semi F20 stainless steel (NS) 2. A22 (NH) |
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Downstream cleanliness | Particles* | <0.03 particles/liter (<1 particle/ft3) | |
Standard downstream cleanliness | <0.03 particles/liter (<1 particle/ft3) >0.01 µm at specified flow | ||
Removal rating | ≥0.0015 µm | ||
Helium leak rating | Qualified | 2 x 10-10 atm cc/sec | |
Tested | 1 x 10-9 atm cc/sec | ||
Operating conditions | Maximum inlet pressure | 50 bar (725 psig) | |
Maximum forward/reverse differential pressure | 5.2 bar (75 psi) | ||
Maximum operating temperature: | Insert gases: | 400°C (725°F) | |
Corrosive and reactive gases: | Gas type and condition dependent** | ||
Particle retention | Greater than 99.9999999% (9 LRV) removal of all particles at 100 slpm | ||
* Particle cleanliness qualified following SEMASPEC Test Method for Particle Shedding (#93021511A-STD). ** Contact your Entegris Account Manager for specific details. |
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Part Number | Fitting Size and Type | Length | Housing Type |
---|---|---|---|
WGL100NH3R2 | 1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet | 84.1 mm (3.31") | A22 |
WGL100NS3R2 | 1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet | 84.1 mm (3.31") | Electropolished 316 L semi F20 stainless steel |
Nickel filters are not recommended for use with CO2, O3, and low-level hydride dopant gases.