Wafergard® III NF-750 In-line Gas Filters
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- Ultrapure gas lines
- High temperatures applications
- Valve-manifold boxes
- New fab construction
- Upgrade of existing fluoropolymer filters
- Spin rinse dryers
- Inert and reactive gases
- Bulk gas
- Vapor phase gas
Specifications
Materials | Filter element | Sintered nickel membrane filter |
Housing | Electropolished VAR 316L stainless steel housing | |
Downstream cleanliness | Particles1, 2 | <0.03 particles/ liter (<1 particle/ft3) > 0.01 µm @ 300 slpm |
Volatiles3 | Volatile outgassing of H2O, O2, and THC is below detectable limits (by RGA and FID at room temperature) | |
Removal rating | ≥0.0015 µm | |
Surface finish interior | ≤5 µin Ra | |
Total flow area | 140.0 cm2 | |
Helium leak rating | Qualified | 2 x 10-10 atm-cc/sec |
Tested | 1 x 10-9 atm-cc/sec | |
Operating conditions | Maximum inlet pressure | 52 bar (750 psig) @ 100°C (212°F) |
Maximum forward/reverse differential pressure | 7 bar (100 psid) | |
Maximum operating temperature | Inert gases | 400°C (752°F) @ 27.5 bar (400 psig) |
Corrosive and reactive gases | 50°C (122°F) @ 52 bar (750 psig) | |
Warranty | 5 year | |
Particle retention | Greater than 99.9999999% (9 LRV) removal of all particles at 300 slpm; greater than 99.9999% (6 LRV) removal of all particles at 750 slpm (referenced at the most penetrating particle size) | |
Flow rating | See performance data |
1 Particle cleanliness qualified following SEMASPEC Test Method for Particle Shedding (#93021511A-STD).
2 Verified at 100 SLPM for 1⁄4² gasket seal fitting (compatible with VCR® fitting).
3 Volatile cleanliness qualified following SEMASPEC Test Methods for: THC Contribution (#90120396B-STD), Moisture Contribution (#90120397B-STD), Oxygen Contribution (#90120398B-STD).
Successfully Opted for software Updates
Part Number | Fitting Size and Type |
---|---|
WG3NS7RR4 | 1/2" Gasket seal (compatible with VCR fitting) male inlet/outlet |