Wafergard® III NF Micro XL In-line Gas Filters

Download Image

Provide superior particulate filtration for ultrapure gas system filtration and are ideal for high-temperature and dynamic-pressure applications.

State-of-the-art housing assembly eliminates outgassing by minimizing weld area
All-metal construction is ideal for high-temperature and dynamic-pressure applications
Compact size and flexible choice of fittings provide ultimate design efficiency and minimize engineering costs

Read More Read Less

Specify Your Part

Fitting Size and Type

Length

Part Number:

Interested in an Entegris Product?

To discuss your specific needs, contact your local Entegris representative.

Don't have an Entegris representative?

Request a Quote

Please fill out the form below and someone will contact you shortly.

* Required

First Name:

Please enter a first name

Last Name:

Please enter a last name

Country:

Please select a country/region

Email Address:

Please enter a valid email

Phone Number:

Please enter a valid phone number.

Company:

Please enter your company.

Company Address

You are required to accept the Captcha.

An error occurred while submitting your quote request. Please try again.

Cancel

Quote Requested

Thank you for requesting a quote. Someone from Entegris will contact you shortly.

Your quote number is {0}.

Top of page

CAD CAD Files

CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.

Go to Part Selector

Applications Wafergard® III NF Micro XL In-line Gas Filters Applications

Ultrapure gas lines
High temperature applications
New fab construction
Dynamic-pressure applications
Inert and reactive gases

Specifications

Drawings

Performance Data

Product Specifications

Materials	Filter element	Sintered nickel membrane filter
	Housing	Electropolished VAR316L stainless steel housing
Downstream cleanliness	Particles	<0.03 particles/liter (<1 particle/ft³) >0.01 μm
	Volatiles	Volatile outgassing of H₂O, O₂, and THC is below detectable limits (by RGA and FID at room temperature)
Removal rating	≥0.0015 μm
Surface finsh interior	≤5 μin Ra
Helium leak rating	Qualified	2 × 10^-10 atm-cc/sec.
	Tested	1 × 10^-9 atm-cc/sec.
Maximum operating conditions:	Maximum inlet pressure	20 MPa (200 bar, 2900 psid) at 20°C (68ºF)
	Design pressure	20 MPa (200 bar, 2900 psid) at 20°C (68ºF)
	Maximum forward/reverse differential pressure	1 MPa (10 bar, 150 psid)
	Maximum operating temperature	Inert gases	400°C (725°F) @ 35 bar (500 psi)
		Corrosive and reactive gases	50°C (122°F) @ 70 bar (1000 psi)
Warranty	5 year
Particle retention	Greater than 99.9999999% (9 LRV) removal of all particles at 15 slpm
Flow rating	Refer to performance data

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Apr 11, 2023 Data Sheet Wafergard® III NF Micro XL In-line Gas Filters

208.2 kB

Published Apr 11, 2023 Data Sheet Wafergard® III NF Micro XL In-line Gas Filters - A4

207.7 kB

Published Nov 2, 2020 Manual and Guide Wafergard® Gas Filter Compatibility Guide

102.3 kB

Part Numbers

Wafergard® III NF Micro XL In-line Gas Filters Part Numbers

Part Number	Fitting Size and Type	Length
WG3NS8RR2	1/4" Gasket seal (compatible with VCR fitting) male inlet/outlet	84.1 mm (3.31")
WG3NS8SL2	1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet, short Version	50.8 mm (2.00")