Wafergard® III NF Micro XL In-line Gas Filters
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- Ultrapure gas lines
- High temperature applications
- New fab construction
- Dynamic-pressure applications
- Inert and reactive gases
Specifications
Materials | Filter element | Sintered nickel membrane filter | ||
Housing | Electropolished VAR316L stainless steel housing | |||
Downstream cleanliness | Particles | <0.03 particles/liter (<1 particle/ft3) >0.01 μm | ||
Volatiles | Volatile outgassing of H2O, O2, and THC is below detectable limits (by RGA and FID at room temperature) | |||
Removal rating | ≥0.0015 μm | |||
Surface finsh interior | ≤5 μin Ra | |||
Helium leak rating | Qualified | 2 × 10-10 atm-cc/sec. | ||
Tested | 1 × 10-9 atm-cc/sec. | |||
Maximum operating conditions: | Maximum inlet pressure | 20 MPa (200 bar, 2900 psid) at 20°C (68ºF) | ||
Design pressure | 20 MPa (200 bar, 2900 psid) at 20°C (68ºF) | |||
Maximum forward/reverse differential pressure | 1 MPa (10 bar, 150 psid) | |||
Maximum operating temperature | Inert gases | 400°C (725°F) @ 35 bar (500 psi) | ||
Corrosive and reactive gases | 50°C (122°F) @ 70 bar (1000 psi) | |||
Warranty | 5 year | |||
Particle retention | Greater than 99.9999999% (9 LRV) removal of all particles at 15 slpm | |||
Flow rating | Refer to performance data |
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