Wafergard® III NF Mini/Mini XL In-line Gas Filters
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Applications
- Ultrapure gas lines
- High-temperature and dynamic-pressure applications
- Inert and reactive gases
- Gas cabinets and panels
- Valve manifold boxes
- Hookup
Note: Not recommended for use with CO, O3, and low-level hydride dopant gases
Specifications
| Materials | Filter membrane | Nickel | |
| Housing, end cap | Low sulfur 316L stainless steel | ||
| Initial downstream cleanliness | ≤0.03 particles/liter (≤1 particle/ft3) ≥0.01 μm | ||
| Removal rating | ≥0.0015 μm | ||
| Particle retention | Greater than 99.9999999% (9 LRV) removal of all particles at 60 slm (Mini) and 120 slm (Mini XL): referenced at the most penetrating particle size | ||
| Surface finish interior | ≤ 5 μin Ra | ||
| Helium leak rating | Tested | 9 × 10-10 Pa m3/sec (9 × 10-9 atm cc/sec) | |
| Maximum conditions | Maximum operating pressure: | 16.2 MPa (162 bar, 2346 psid) at 20°C (68°F) | |
| Maximum forward/reverse differential pressure: | 3.3 MPa (33 bar, 485 psid) @RT | ||
| Maximum design temperature: | Inert gases: 400°C (725°F) | ||
| Flow rating | Refer to performance data | ||
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Part Numbers
| Part Number | Fitting Size and Type | Length |
|---|---|---|
| WG3NS1RR2 | 1/4" Gasket seal (compatible with VCR fitting) male inlet/outlet | 84.1 mm (3.31") |
| WG3NS2RR2 | 1/4" Gasket seal (compatible with VCR fitting) male inlet/outlet | 127.0 mm (5.00") |
| WG3NS2RR4 | 1/2" Gasket seal (compatible with VCR fitting) male inlet/outlet | 133.3 mm (5.25") |