Wafergard® II 3XP In-line Gas Filters
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- Ultra-high purity (UHP), high flow gass lines
- Applications with mid-flow range rates up to 500 slpm such as diffusion, annealing, epitaxy tools
Specifications
Materials | Membrane, housing | 316 L stainless steel |
Surface finish interior | ≤10 µm Ra | |
Removal rating | ≥0.0015 µm | |
Downstream cleanliness | Cleanliness 0.03 particles/L (<1 particle/ft3) >0.01µm | |
Operating conditions | Maximum operating pressure: | 54 bar (780 psig) |
Maximum differential pressure: | 9.8 bar (142 psig) | |
Maximum operating temperature: | 460°C (860°F) | |
Helium leak rating | Qualified | 2 x 10-10 atm cc/sec |
Tested | 1 x 10-9 atm cc/sec | |
Warranty | 2 year |
Successfully Opted for software Updates
Part Number | Form Factor | Connection |
---|---|---|
WG2L200SS3R2 | Mini | 1/4" gasket seal (1/4" VCR compatible) |
WG2L200SS3R4 | Mini | 1/2" gasket seal (1/2" VCR compatible) |
WG2L500SS5R2 | Mini XL | 1/4" gasket seal (1/4" VCR compatible) |
WG2L500SS5R4 | Mini XL | 1/2" gasket seal (1/2" VCR compatible) |