Wafergard® II SF Micro XL In-line Gas Filters
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Applications
- Ultra high purity gas lines
- High temperature applications
- New fab construction
- Dynamic pressure applications
- Inert and reactive gases
Specifications
| Materials | Filter element | Stainless steel membrane filter |
| Housing | Electropolished VAR316L stainless steel | |
| Downstream cleanliness | Particles | <0.03 particles/liter (<1 particle/ft3) >0.01 µm |
| Volatiles | <10 ppb moisture | |
| Removal rating | ≥0.0015 µm | |
| Surface finish interior | ≤5.00 µin Ra | |
| Helium leak rating | Qualified | 2 x 10-10 atm cc/sec |
| Tested | 1 x 10-9 atm cc/sec | |
| Maximum operating conditions | Maximum inlet pressure: | 20 MPa (200 barg; 2900 psig) @ 20°C (68°F) |
| Maximum forward/reverse differential pressure: | 1 MPa (10 bar; 150 psid) | |
| Maximum operating temperature: | 460°C (860°F) @ 35 bar (500 psi) | |
| Warranty | 2 years | |
| Particle retention | Greater than 99.9999999% (9 LRV) removal of all particles | |
| Flow rating | Refer to performance data | |
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Part Numbers
| Part Number | Product Type | Fitting Type | Fitting Size | Length |
|---|---|---|---|---|
| SI2R15E05 | Wafergard® II | Gasket seal, male | 1/4" | 84.1 mm (3.31") |
| SI2R19E07 | Wafergard® II | Gasket seal, female | 1/4" | 50.8 mm (2.00") |
| SI2R20E08 | Wafergard® II | Gasket seal, male | 1/4" | 50.8 mm (2.00") |
| WG2SS8RR2 | Wafergard® | Gasket seal, male | 1/4" | 84.1 mm (3.31") |