Miscellaneous Carriers
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CAD
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Applications
- Wafer handling
- Wafer processing
Specifications
| Part Number | Device Size | Pocket Size (L x W x H) | Overall Size (L x W x H) | Compatible Handles |
| H48-01-0215 | 7.9 mm (0.31") | 8.1 mm x 3.6 mm x 7.1 mm (0.32" x 0.14" x 0.281") | 64 mm x 71 mm x 13 mm (2.5" x 2.8" x 0.5") | A01, A07, A029 |
| A16-01-0215 | 4.8 mm to 15.7 mm dia. (0.19" to 0.62") | 16.5 mm x 3.6 mm x 9.1 mm (0.65" x 0.14" x 0.36") | 89 mm x 61 mm x 18 mm (3.5" x 2.4" x 0.7") | A07 |
| A118-01-0215 | 25.4 mm (1.00") | 25.4 mm x 7.9 mm x 9.5 mm (1.00" x 0.31" x 0.38") | 76 mm x 74 mm x 15 mm (3.0" x 2.9" x 0.6") | A05, A08 |
| A63-01-0603 | 102 mm to 203 mm (4" to 8") square or rectangular | 0.8 mm (0.030") pocket width 5.84 mm (0.230") pocket spacing |
210 mm x 152 mm x 121 mm (8.3" x 6.0" x 4.8") | -- |
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Part Numbers
| Part Number | Product Type | Wafer Capacity | Materials |
|---|---|---|---|
| A118-01-0215 | Process wafer carrier | 18 | PFA |
| A16-01-0215 | Process wafer carrier | 42 | PFA |
| A16-02-0215 | Cover | 42 | PFA |
| A63-01-0603 | Process wafer carrier | 20 | Blue polypropylene |
| H48-01-0215 | Process wafer carrier | 48 | PFA |