Pegasus™ 100 series coatings are a family of precision-engineered PVD coatings tailored for fluorine plasma etch applications. Our Yttrium-based Oxide coatings are deposited at low temperatures and can be deposited on aluminum, alumina, stainless steel and other commonly used substrate materials, with superior adhesion. These coatings are high purity, exhibit homogeneous microstructure and are conformal to the substrate surface.
Fluorine etch resistance
Low particle generation
Dense and transparent
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ApplicationsPegasus™ 100 Series Coatings Applications
Compatibility: Metals, Ceramics (e.g., Alumina, AIN) and Semiconductors
Size: Up to 1016 mm D x 508 mm H (40" D x 20" H)
Deposition: 200°C (392°F)
Use: 1000°C (1832°F)
Up to 10 μm
Conformal - substrate dependent
Excellent etch resistance in fluorine environments