Pegasus™ 100 Series Coatings
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Specifications
Substrate: | Compatibility: Metals, Ceramics (e.g., Alumina, AIN) and Semiconductors |
Size: Up to 1016 mm D x 508 mm H (40" D x 20" H) | |
Structure: | Microcrystalline |
Temperature: | Deposition: 200°C (392°F) |
Use: 1000°C (1832°F) | |
Coating thickness: | Up to 10 μm |
Electrical resistivity: | >10-12 Ω-cm |
Purity: | >99% |
Hardness: | 1400 HV |
Elastic modulus: | 160 GPa |
Roughness: | Conformal - substrate dependent |
Corrosion resistance: | Excellent etch resistance in fluorine environments |
Oxidation resistant up to 1000°C (1832°F) in air | |
Resistant to most acids and alkalis |
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