Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
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For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
Pegasus™ 500 series coatings are a family of precision-engineered PVD coatings tailored for Fluorine and Chlorine plasma etch applications. Our Aluminum-based Oxynitride coatings are deposited at low temperatures and can be deposited on aluminum, alumina, stainless steel and other commonly used substrate materials, with superior adhesion. These coatings are highly transparent in the visible and IR range.
Fluorine etch resistance
Low particle generation
Dense and transparent
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ApplicationsPegasus™ 500 Series Coatings Applications
Semiconductor chamber components
Compatibility: Metals, Ceramics (e.g., Alumina, AIN) and Semiconductors
Size: Up to 1016 mm D x 508 mm H (40" D x 20" H)
Deposition: 200°C (392°F)
Use: 1000°C (1832°F)
Up to 10 μm
Conformal - substrate dependent
Excellent etch resistance in fluorine environments