Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
Entegris is committed to providing customers the best information possible to ensure optimal product performance. Our resource center provides in-depth product and application information through product data sheets, technical papers, SDSs and more. Be sure to visit the resource center regularly to see updates and new additions.
For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
Our semiconductor grade graphite is an ideal material for current and legacy Etch equipment. It serves well as replacement components for silicon, quartz and other ceramics to improve process performance. Currently, all graphite etch chamber components are machined to customer prints. Materials used for these applications are DFP-1 and DFP-2.
Compatible with process chemistries
Reduced particles in the chamber
Longer life time
Uniform wear due to unique microstructure
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