Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
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For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
Our sputtering targets have a unique microstructure providing homogenous and uniform films. The purified graphite has less than 5 ppm metallic contamination providing superior film purity. The elevated CTE will enable the targets to bond to the metal backing plate and maintain optimum sputtering at high operating temperatures.
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ApplicationsSputtering Targets Applications
Graphite can be densified to create a material that has less porosity and provide increased film uniformity
High film purity which exceeds the industry standards
Multiple grades are available for any target size or thickness
The isotropic physical properties of Poco graphite will provide uniform sputtering with no preferential sputtering