Entegris is the global leader in materials integrity management. The company delivers technology, product and service solutions that purify, protect and transport critical materials used in the semiconductor and other high-technology industries. These solutions are manufactured and serviced around the globe, with support in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Entegris is ISO 9001 certified.
Entegris is committed to providing customers the best information possible to ensure optimal product performance. Our resource center provides in-depth product and application information through product data sheets, technical papers, SDSs and more. Be sure to visit the resource center regularly to see updates and new additions.
For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
Our sputtering targets have a unique microstructure providing homogenous and uniform films. The purified graphite has less than 5 ppm metallic contamination providing superior film purity. The elevated CTE will enable the targets to bond to the metal backing plate and maintain optimum sputtering at high operating temperatures.
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ApplicationsSputtering Targets Applications
Graphite can be densified to create a material that has less porosity and provide increased film uniformity
High film purity which exceeds the industry standards
Multiple grades are available for any target size or thickness
The isotropic physical properties of Poco graphite will provide uniform sputtering with no preferential sputtering