150 mm SMIF Pod

The 150 mm SMIF pod internal environment is better than Class 1, and enables safe transport and protection of 150 mm wafers during processing.

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Door Type

Ergo Handle Color

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CAD CAD Files

CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.

Applications 150 mm SMIF Pod Applications

Part Numbers

150 mm SMIF Pod Part Numbers

Part Number	Door Type	Ergo Handle Color
9700-9850-01	MRP door	Black