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E200 Wafer SMIF Door Assembly

Upgrade the performance of your A200 or M200 wafer SMIF pod and improve wafer protection with our state-of-the art, pre-cleaned E200 wafer SMIF pod door assemblies.

  • Direct replacement door and gasket for all A20X and M20X wafer SMIF pods
  • Withstands automated cleaning, which enables enhanced microcontamination control
  • Door seal, breather filter, and purge port accessories are available
  • Gasket design improves door seal reliability
  • Metal-free construction reduces contamination risk and eliminates corrosion
  • Engineered surface on door opening mechanism CAM and latch arm ends minimizes particles
  • Field removable plugs enable automation interface with FEOL, BEOL, A, B, C, and D info pads
  • Optional RFID tags can be easily installed in the field for wafer lot tracking throughout the fab 
  • Read More Read Less
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