76.2 mm (3") Wafer Carriers
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- Wafer handling
- Wafer processing
Specifications
Part Number | Compatible Boxes | Overall Size |
A72-30M-0215 | E52-101, E38-101 | 142 mm x 94 mm x 83 mm (5.6" x 3.7" x 3.3") |
PA72-30M-* | E52-101, E38-101 | 142 mm x 94 mm x 83 mm (5.6" x 3.7" x 3.3") |
A82M-0215 | E52-101, E38-101 | 142 mm x 94 mm x 83 mm (5.6" x 3.7" x 3.3") |
PA82M-* | E52-101, E38-101 | 142 mm x 94 mm x 83 mm (5.6" x 3.7" x 3.3") |
A190-30M-0215 | E52-101 | 142 mm x 94 mm x 60 mm (5.6" x 3.7" x 2.4") |
*Denotes material option
Successfully Opted for software Updates
Part Number | Materials | Color | End Wall Configuration | Profile | Track Alignment Notches |
---|---|---|---|---|---|
A190-30M-0215 | PFA | Natural | Solid | Low | None |
A72-30M-0215 | PFA | Natural | Solid, Flanges | High | None |
A82M-0215 | PFA | Natural | "U" shaped | High | None |
PA72-30M-0603 | Polypropylene | Blue | "U" shaped | High | None |
PA72-30M-61C02 | STAT-PRO® 100 carbon powder polypropylene | Black | "U" shaped | High | None |
PA82M-0603 | Polypropylene | Blue | "U" shaped | High | Bottom |
PA82M-61C02 | STAT-PRO® 100 carbon powder polypropylene | Black | "U" shaped | High | Bottom |