IntelliGen® HV20 Dispense System

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Advanced two-stage system that enables reliable, independent dispense and filtration of up to 20 mL of high-viscosity fluids.

Combined with Connectology^® filter design, the two-stage dispense technology integrates high-purity filtration with repeatable dispense, allowing reliable dispense of high viscosity fluids (1,000-20,000 cP) without sacrificing filtration performance
Real-time, interactive confirmation tool simplifies the system recipe and filter priming programming and allows SPC data access for better process engagement
Intuitive programming interface provides user-friendly confirmation tools with real-time alerts that help minimize costly wafer defects

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Applications IntelliGen® HV20 Dispense System Applications

High-viscosity (1,000 - 20,000 cP) POU photochemical dispense

Specifications

Drawings

User-friendly confirmation tools:

Dispense pressure profile compare (%)
Dispense air detect volume (mL)
Filtration averagel delta pressure (psi)
Maximum fill pressure (psi)
Total cycle time (sec)

Product Specifications

Materials	Wetted surfaces	PTFE, modified PTFE, Kalrez^®
Dispense performance
	Volume	0.1–20.0 mL in 0.001 mL increments
	Dispense rate	0.1–3.0 mL/sec in 0.01 mL/sec increments
	Repeatability	<0.03 mL 3 sigma
	Viscosity range*	1,000–20,000 cP
	Maximum dispense design pressure**	1.7 MPa (250 psi)
Recharge performance	Fill, filtration, vent, and purge rates	0.1–3.0 mL/sec in 0.01 mL/sec increments
Recharge performance	Vent frequency	Auto venting or 1–10,000 dispense cycles
Mechanical	Inlet, outlet, vent connections	3/8" (9.53 mm) interchangeable Super Type Pillar^® fitting
	Filter	Optimizer^® ST filter
	Inlet gas type	Regulated N₂ or CDA
	Inlet gas pressure	0.41 - 0.45 MPa (60 - 65 psid)
	Vacuum	- 68 kPa (20” Hg)
Electrical	Current rating	1.75 amp
	Input voltage (system)	24 VDC, 1.75 amp
	Serial communication	Dependent on interface module
	Parallel communication	Triggers and acknowledgments
Dimensions	Height Width Depth	354.2 mm (13.95") 115.0 mm (4.53") 328.3 mm (12.92")
Weight	~17.0 kg (37.5 lbs)
Certifications	CE
Environments (indoor use only)	Altitude Ambient temperature***	<2,000 m 5° to 40°C (41° to 104°F)
The pump is not limited to this viscosity range unless the dispense pressure goes beyond 250 psi. Maximum pressure is a limit on the window of operation. **Dependent on tool. Proper ventilation may be needed to keep the temperature consistent.

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Dec 14, 2023 Data Sheet IntelliGen® HV20 Dispense System

710.4 kB

Published Dec 14, 2023 IntelliGen® HV20 Dispense System - A4

710.4 kB

Published Jul 1, 2021 Brochure Chasing the Perfect Pattern

1.4 MB

Published Aug 1, 2018 Application Note Monitoring Air Supply in Spin Coating Photolithography Process

1.2 MB

Published Jan 1, 2022 Manual and Guide IntelliGen® HV20 Dispense System

8.2 MB

Accessories IntelliGen® HV20 Dispense System Accessories

IGHVINT02

Interface module box for D-Sub 25 pin HV20 pump head
IGHVSP07

IntelliGen^® HV external stop valve, 3/8" inlet to 1/4" outlet
IGHVSP18

IntelliGen^® HV external stop valve, 3/8" inlet to 3/8" outlet
AWAA0LKM1

Impact^® HV OF filter, 1.0 µm retention rating, Kalrez^® O-ring
IGMINISP28

RS422 - RS232C K2 converter
IGMP12HOR02

Multipurpose interface V-2 for D-Sub 15 pin HV20 pump head
ENCOMTC00

Encompass^® dispense system trigger cable

Part Numbers

IntelliGen® HV20 Dispense System Part Numbers

Part Number	Fitting Type	Cable Length	Connector	Fitting Configuration
IGHV20PHBP3	3/8" Super Type Pillar®	1.2 m	RDS01 connector	Straight
IGHV20PHKP3	3/8" Super Type Pillar®	1.0 m	D-Sub 25 pin	Straight
IGHV20PHLP3	3/8" Super Type Pillar®	3.0 m	D-Sub 15 pin	Straight
IGHV20PKPL3	3/8" Super Type Pillar®	2.0 m	D-Sub 25 pin	Elbow