Sensing and Control
Precise control and measurement of process fluids in harsh environments and ultrapure applications
Providing a broad range of integrated flow controllers, flowmeters, pressure transducers, concentration monitors and other measurement and control solutions to improve process visibility, increase yields and maximize productivity.
CAD - You have the ability to access 3D and 2D product data that is compatible with today's CAD modeling packages. To decrease system design time, simply download parts directly into your design.
Advanced, optically based monitoring and high performance concentration monitors enable greater process efficiency for BEOL, FEOL and sub-fab delivery chemical systems. Our portfolio of InVue® concentration monitors, dissolved oxygen sensors and refractometers provide customers with in-line, real-time and scalable monitoring and detection systems.
Our electronic flowmeters provide simultaneous measurement of outlet pressure and flow rate, allowing for greater control of process variables. We offer an InVue® Model NT4400 that is ideal in high purity applications, and an NT™ Model 4401 that is ideal in high-temperature chemical applications.
We have combined the latest electronic sensing technology with high-purity materials to create leading-edge pressure transducers to help you monitor or control process conditions. Measure vacuum and positive pressure conditions accurately and reliably with our single-port or flow-through models.CAD - You have the ability to acess 3D and 2D product data that is compatible with today's CAD modeling packages. To decrease system design time, simply download parts directly into your design.