Speaker(s)
- Connor Gallegos | Product Manager
- Nilesh Gunda | Director, Coatings Product Technology
Protecting Plasma Chamber Parts and Components with Advanced Coatings
Skyrocketing demand for high-density digital storage has changed device design and fabrication. New materials and processes are required to ensure reliability at high volumes. This places new burdens on the cleanliness of etch and deposition chambers to avoid yield loss and maintain consistent results for each wafer.
In this recorded webinar, Connor Gallegos, product manager, and Nilesh Gunda, director, coatings product technology share the importance of advanced coatings for chamber parts and components, and highlight three successful coating methods.
- PVD and ALD coatings overview
- PVD and ALD coatings applications and components
- ALD and PVD coatings case study