Join Entegris as we present on the following topics:

Poster Sessions:

Monday, July 22 | 5:45 – 7:00 PM

In-Situ Process Monitoring of Precursor Delivery Using Infra-Red Spectroscopic Method
By: Robert Wright Jr., Thomas Baum

Synthesis of Group VI Oxyhalide Adducts and Mo Metal Film Growth on TiN Surfaces
By: David Ermert‚ Robert Wright Jr.‚ Thomas Baum


Tuesday, July 23 | 3:15 – 3:30 PM
Room Grand Ballroom H-K

Selective Deposition of Silicon Nitride
By: Han Wang‚ Bryan Hendrix‚ Thomas Baum