Poster session

MS-TuP4 Novel Safe Approach to Process Gas Delivery
By: Richard Elzer, Entegris; K.W. Olander, Retired co-founder of ATMI Corp

The history of high pressure toxic gases is riddled with safety events, actual injuries and deaths as well as near misses, some reported and many not report.

Featured White Paper

Novel Safe Approach to Process Gas Delivery

This technical white paper examines how SAGS function, where they’ve found utility, and suggests future uses in semiconductor manufacturing, various other industry applications, as well as laboratory settings.

Download the White Paper
novel safe approach poster