Our specialists will present products and solutions that contribute to reduce operating costs, maximize efficiency and improve the value of your CMP & WEC operations - see program below. Take this opportunity to meet Entegris’ technologists, and exchange on your challenges. We will end up the day with a friendly and informal 'after work' party. You are all welcome!

Please contact us to register for the session of your choice by June 21st at the latest.

CMP & WEC Technology Day


Chemical Mechanical Planarization Session

08:30 Registration & Welcome

- Entegris company overview
- CMP Challenges

Increasing CoO with PlanarClean® Advanced Post-CMP Cleaning Solutions
- Post-CMP cleans technical roadmap 
- Entegris PCMP cleans key benefits 
- BEOL & FEOL technology update

Measuring and Controlling CMP Critical Chemistry
- Flow metering and control for bulk and process chemicals
- Monitoring real time chemical concentrations
10:30 Networking Refreshment Break

Optimizing Filtration of CMP Slurries for Performance and Cost of Ownership
- Full contamination control solution from bulk distribution to slurry dispense points
- Nanofiber technology media vs traditional media

Continuous Slurry Monitoring to Detect Agglomeration and Prevent Scratching - Why monitor LPCs?
- Overview of Entegris online CMP monitoring solutions
- Examples of how Entegris Particle Sizing Solutions can be used to improve the CMP process
12:15 Networking Lunch sponsored by Entegris

Wet Etch & Clean Session

13:45 Registration & Welcome

Real Time Measurement and Control of Critical Chemistry
- Flow metering and control of bulk and process chemicals
- Refractive index technology to enable chemical mixing and dispense process excursion control

Controlling Contamination To Manage Latent & Killer Defects
- Particles and ions affect device reliability and yield
- Filtration to support defectivity management
- Most adequate solutions
15:15 Networking Refreshment Break

Fluid Management to Address Critical Contamination and Safety Risks
- High purity PFA tube to transport chemicals
- Avoiding electro-static build-up in PFA tube
- Safe and reliable connections for leak-free performance

Application Expertise to Support Your Defect Management Strategy
- Entegris capabilities
- Real case examples
- Towards a new collaboration
17:00 'After work' sponsored by Entegris