Entegris is proud to be an enabling supplier of storage and filtration media and we look forward to sharing our insights and meeting with experts from the rest of the value chain.
Entegris is proud to be an enabling supplier of storage and filtration media and we look forward to sharing our insights and meeting with experts from the rest of the value chain.
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FEATURED PRESENTATIONS
Yield and Contamination Control
November 14, 4:15 p.m.
Semiconductor manufacturing is entering a period of rapid change with new gases being introduced to enable device designs. Hydrogen gas, for example, is extremely important to EUV, but it can carry contaminants that
impede lithography or damage projection optics. In this session, we’ll discuss tools and methods that suppliers and manufacturers can use to increase the purity of their electronic gases and the productivity of their lithography processes.
Speaker:
Jim O’Neill, Senior Vice President and Chief Technology Officer, Entegris
IRDS Round Table
November 14, 11:15 a.m.
Speaker:
Sarah Voght, Research and Development Manager, Entegris