Join Us
Entegris is pleased to be a diamond sponsor and presenter at ICPT 2023. Our presentations will introduce new solutions across the spectrum of CMP applications. We’re in a unique position to offer single source solutions and eliminate unnecessary contamination risk from incompatible chemicals or consumables. As today’s leading-edge chip designs become tomorrow’s mainstream products, single sourcing offers tremendous benefit to all fabs.
Featured Presentation
Oral Presentation | 015 C08 Wednesday, November 1 - 9:05 AM
Improving Yield through Reduction of FPC with an Advanced Filtration Strategy
Yu-Chieh Fu, Applications Development Engineer, Entegris
Yu-Chieh Fu serves as an applications development engineer for Entegris, where he evaluates and optimizes advanced filters for our semiconductor manufacturing partners. He also trains users, troubleshoots filtration issues in CMP processes, and performs customized experiments to help speed new product introduction. Prior to Entegris, Yu-Chieh worked at PTTC as a material R&D engineer and TSMC as a thin film process engineer. He obtained a master’s degree from the Department of Materials Science and Engineering at National Cheng Kung University.
Poster Presentation
P49 C08 | Tuesday, October 31 - 4:00 PM
Filter Pore Size Coverage for Abrasive Size and Concentration
Fumiaki Hashisako, Applications Engineer, Entegris
P57 C08 | Wednesday, November 1 - 4:40 PM
pH Modulation of Slurry Abrasives and the Impact on System Filtration
Bradley Wood, Applications Engineering Manager, Entegris