ASMC is the leading international technical conference for exploring solutions to improve the collective micro-electronics manufacturing expertise.
ASMC is the leading international technical conference for exploring solutions to improve the collective micro-electronics manufacturing expertise./content/entegris-live/en/home/about-us/events/semi-asmc-2018
Entegris is pleased to be participating in the following sessions:
- Tuesday, May 1
Poster Session, 5:15-6:45 p.m.
Airborne Molecular Contamination: Formation, Impact,
Measurement, and Removal of Nitrous Acid (HNO2)
Authors: Jürgen M Lobert, Reena Srivastava and Frank
- Thursday, May 3
Session 15 - Advanced Materials & Photonics, 10 a.m.
Chairs: Marc Bergendahl, IBM Research; Pratik Joshi, Ph.D.,
Samsung; Thomas Phely-Bobin, Ph.D., Entegris
As technology requirements become more challenging, base material performance as well as process interactions become a more significant contributor or detractor to Manufacturing success. In this session, various elements contributing to process innovation and understanding are reviewed. Additionally an inline optical device test system for wafer level characterization of silicon photonic manufacturing is reviewed.