Join Entegris at booth 31 to discover why our SDS®, VAC® and PDS® technologies are the first choice in safety with over 100 of the world’s semiconductor leaders using Entegris solutions.


Wednesday | May 1st | 4:15 PM

Speaker: Ed Jones, Senior Engineer of Specialty Gas Solutions

Reliability and innovations of SAGS packages and their benefit over high pressure alternatives

Abstract: This presentation will highlight the reliability of our packaging technologies including VAC® and SDS® specialty gas cylinders and show how they can drastically reduce the risk over high pressure alternatives. It will cover proper installation and removal procedures and the tools necessary to do so safely and reliably. In addition, it will highlight recent improvements to our packages and provide a direction for future enhancements that could be enabled with a collaboration between tool OEM’s, customers, and suppliers of filled gas cylinders. 

Featured Content

Innovation is no accident™

Entegris is the creator of revolutionary subatmospheric gas delivery solutions, including Safe Delivery Source® (SDS®) and Vacuum Actuated Cylinder® (VAC®) technologies

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Featured Product Solutions

We provide a variety of gas packages to fit a wide range of needs. From semiconductor applications to solar processes to flat panel display manufacturing, we have the right gas in the right package and delivery source for you.