Join Us for Onsite Presentations
Oral Presentation
- Entegris, Tetsu, Kohyama
- INPRIA Authors: Shu-Hao Chang, Jan Doise, Michael Kocsis, Peter de Schepper
- Imec Author: Philippe Foubert
Poster Presentations
Metallic Contamination Reduction in Polymer Solution using Membrane Purification Technology
- Entegris Authors: Pranesh Muralidhar, Antonio Ramirez, Aiwen Wu, Lawrence Chen, Yamin Liu
- Dupont Authors: Luxi Shen, Robert Blacksmith, Sabrina Wong, Matthew Melanson, Andrey Rudenko
Novel UPE filtration technology for advanced photolithography materials with defect performance improvement
- Entegris Authors: Ryo Yokoyama, Akihito Ui, Christi Dawydiak, Vinay Kalyani
Wet etch process for high resolution DSA patterning for advanced node DRAM
- Presenter/Author: Hsing-Chen Wu
- Entegris Authors: Min-Chieh Yang, Ming-Chi Liao, Eri Hirahara
- ASL Author: Hiroki Kawada
- Micron Author: Tomohiro Iwaki