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SPIE Advanced Lithography 2023
Entegris is pleased to be a sponsor at this year’s SPIE Advanced Lithography conference. SPIE Advanced Lithography is the leading global lithography event featuring a technical program focused on works in optical lithography, metrology, and EUV.
VIEW CONFERENCE SITE
Feb 26 - Mar 3 2023 San Jose, CA San Jose Convention Center
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SPIE Advanced Lithography 2023 February 26, 2023 1:00 PM March 3, 2023 11:00 AM San Jose Convention Center Entegris is pleased to be a sponsor at this year’s SPIE Advanced Lithography conference. SPIE Advanced Lithography is the leading global lithography event featuring a technical program focused on works in optical lithography, metrology, and EUV. /content/entegris-live/en/home/about-us/events/spie-advanced-lithography-2023

Join Us for Onsite Presentations

Oral Presentation

Continued Optimization of Point-of-Use Filtration in Metal Oxide Photoresist to Reduce Defect Density

  • Entegris, Tetsu, Kohyama
  • INPRIA Authors: Shu-Hao Chang, Jan Doise, Michael Kocsis, Peter de Schepper
  • Imec Author: Philippe Foubert

 

Register to join us

Poster Presentations


Metallic Contamination Reduction in Polymer Solution using Membrane Purification Technology

  • Entegris Authors: Pranesh Muralidhar, Antonio Ramirez, Aiwen Wu, Lawrence Chen, Yamin Liu
  • Dupont Authors: Luxi Shen, Robert Blacksmith, Sabrina Wong, Matthew Melanson, Andrey Rudenko 

Novel UPE filtration technology for advanced photolithography materials with defect performance improvement

  • Entegris Authors: Ryo Yokoyama, Akihito Ui, Christi Dawydiak, Vinay Kalyani

Wet etch process for high resolution DSA patterning for advanced node DRAM

  • Presenter/Author: Hsing-Chen Wu
  • Entegris Authors: Min-Chieh Yang, Ming-Chi Liao, Eri Hirahara
  • ASL Author: Hiroki Kawada
  • Micron Author: Tomohiro Iwaki