Entegris is presenting two scientific contributions at the Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2018). This symposium is a bi-annual event devoted to cleaning and surface preparation for micro and nano-technology for electronic applications and related fields such as photovoltaics and bio-electronics.
Entegris is presenting two scientific contributions at the Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2018). This symposium is a bi-annual event devoted to cleaning and surface preparation for micro and nano-technology for electronic applications and related fields such as photovoltaics and bio-electronics.
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Speakers
Post-CMP Cleaners for Tungsten Advanced Nodes: 10nm and 7nm
By: Ruben Lieten, Daniela White, Thomas Parso, Michael White Entegris, Gmbh; Entegris, Inc
Poster Reception: Monday, Sept. 3rd from 5:30pm to 6:30pm
Location: Promotion Hall
Determination of HCl transport coefficients of real FOUPs polymers for HCl FOUP to wafer cross-contamination assessment
By: Minh-Phuong Tran, Hervé Fontaine, Carlos Beitia, Paola Gonzales-Aguirre, Jorgen Lungren, Sung-In Moon CEA TECH, France; Entegris.
Session 12: Contamination: Metrology and Control
Wednesday, Sept. 5th from 3:00pm to 3:40pm
Location: Promotion Hall