Best Presentation Award Sponsor
Entegris is proud to sponsor the award for Best Presentation at UltraPure Micro 2023. We believe that this event offers one of the best opportunities for attendees to bring home actionable intelligence for their field. We look forward to the award ceremony and to joining you at many informative sessions at this event!
Round Table Discussions:
HIGH PURITY ENVIRONMENTS - INTRODUCTORY PANEL
October 11 | 10:00 - 11:00 AM
Panelist Tony Ozzello, Senior Applications Manager, Entegris
Enabling manufacturing yield via improved control of dissolved contaminants in high purity delivery systems
October 12 | 9:20 - 10:45 AM
Co-moderator: Siddarth Sampath, Applications Manager, Entegris
Featured Presentation | October 12 - 11:45 AM
Predicting Filtration Performance Using Proxy Particles
Presented by: Siddarth Sampath, Applications Manager, Entegris
Co-Author(s): Jamie Chung, Application Engineer, Entegris
Filtration predictive performance techniques haven’t kept up with the rise in purity standards for semiconductor applications. A new technique, introduced in two case studies, will demonstrate improvements in the understanding of filter performance in hydrogen peroxide and hydrochloric acid.
Event Related Content
A Defect Reduction Collaboration Model: This paper examines a collaboration model and case studies to reduce defects while maintaining the composition of semiconductor manufacturing liquids, gases, and ambient air.
In the early days of semiconductor manufacturing, fabs would remove contaminants from their process fluids in a sequence that could be analogized to making a cup of coffee. By using a filter with tiny pores, large contaminants (coffee grounds) are separated from water. Because the coffee grounds are too large to pass through the filter, they can’t pass into the coffee we drink.