Chemical Vapor Conversion Process
Entegris' unique process reimagines silicon carbide (SiC) manufacturing by beginning with the end-product in mind.
Our chemical vapor conversion (CVC) process starts with a specialized non-commercially available grade of synthetic graphite that has been designed and manufactured for efficient conversion to SiC.
The graphite can be rapidly and efficiently machined using conventional multi-axis CNC machines, allowing for complex designs and lightweight structures. Once the desired shape is achieved, the parts are then subjected to our proprietary CVC process that uses silicon-carrying species, converting the graphite to high-purity silicon carbide. During this process, the graphite reacts with a silicon-rich gas at high temperature, converting parts into stoichiometric ß-phase silicon carbide. As the gas penetrates the graphite, a carbon atom is replaced with a silicon atom. The end result – high performing silicon carbide.
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Advantages of the Entegris Process
- Parts are machined to near net shaped while still in the graphite form, which is easier and less costly than machining in silicon carbide.
- No expensive molds or additional design costs associated with our manufacturing process allowing for custom designs and quick changes to existing parts with minimal impact on the customer.
- No significant retooling is needed, allowing design changes to occur in a timely manner and resulting in lower cost of ownership.
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Traditional SiC Manufacturing
In traditional silicon carbide (SiC) manufacturing, silica sand and carbon are combined at high temperatures to produce SiC crystals, which are then used in various applications. SiC manufacturing faces challenges due to its covalent bonding structure, requiring sintering aids that can contaminate the material, adversely affecting the material's desirable properties. It’s also very difficult and costly to machine high-density SiC, often requiring diamond grinding.
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The Entegris Approach to SiC Manufacturing
At Entegris, we have taken a whole different approach. Since our process begins with graphite that is converted into silicon carbide, we do not encounter the same challenges as traditional techniques. Because there is no sintering operation, binding agents, or interfaces, the contamination levels in the converted SiC are typically below 5 ppm, improving the overall quality and performance of our SiC. Since we begin with graphite, we can rapidly and efficiently form complex and customizable shapes before converting to SiC substantially improving upon traditional methods and reducing overall costs.
By challenging long-held beliefs about its hardness and complexity, Entegris enables the creation of intricate components with the same ease as aluminum. This unlocks new possibilities for innovation while expanding the material's potential in semiconductors, aerospace and industrial applications.
Complex shapes. Stronger materials. Bigger possibilities.
Entegris technology offers a groundbreaking approach to silicon carbide manufacturing, making it easier to shape and use than ever before. Our proprietary CVC process is revolutionizing the aerospace industry by enabling the development of complex shapes and advanced structures. Discover how this cutting-edge approach is powering the next generation of space optics.
