Silicon Carbide Slurries


The transition from gas-powered to electric vehicles (EVs) is happening at a faster rate than predicted and batteries are also operating at higher voltages. Both these trends put pressure on power integrated circuit (IC) manufacturers to produce higher volumes of chips using technologies designed to withstand high-temperature, high-frequency operating environments. Part of the answer lies in transitioning from silicon substrates to silicon carbide (SiC) and gallium nitride (GaN).

At Entegris we understand the challenges specific to CMP of SiC wafers and have solutions to improve SiC slurry performance and meet the needs of power IC manufacturers.