Silicon Carbide Slurries
The transition from gas-powered to electric vehicles (EVs) is happening at a faster rate than predicted and batteries are also operating at higher voltages. Both these trends put pressure on power integrated circuit (IC) manufacturers to produce higher volumes of chips using technologies designed to withstand high-temperature, high-frequency operating environments. Part of the answer lies in transitioning from silicon substrates to silicon carbide (SiC) and gallium nitride (GaN).
At Entegris we understand the challenges specific to CMP of SiC wafers and have solutions to improve SiC slurry performance and meet the needs of power IC manufacturers.
On Demand Webinar
Advanced CMP of Silicon Carbide for EVs and Power ICs
The first steps in fabricating SiC wafers involve grinding, lapping, and polishing the wafers to create the necessary surface properties before depositing active layers. The slurries used to carry out these steps, therefore, are becoming more critical.
In this webinar, you will learn about:
- The challenges specific to SiC polishing process
- Slurry performance improvement to address new technical challenges including increasing removal throughput, eliminating scratches, and low cost of ownership
- The benefits of offering an encompassing synergetic solution to improve yield
Featured White Paper
Advanced CMP of Silicon Carbide for EVs and Power ICs
This paper describes challenges specific to CMP of SiC wafers and proposes solutions to improve SiC slurry performance and meet the needs of power IC manufacturers.
Pictogram
Finding CMP Synergies to Improve Wafer Performance, Yield, and Variability
Pictorial explaining how finding synergies between the slurries, components, filters, chemistries, conditioners, brushes, and monitoring tools used in CMP, and sourcing them from Entegris, can improve wafer performance, yield, and variability.
Pictogram
Customizing CMP for Silicon Carbide Wafers
Pictorial explaining how Entegris' customized silicon carbide (SiC) slurry enables specialized CMP processes to cost effectively meet the automotive industry demands for higher operating voltages.
Blog
Advanced CMP of Silicon Carbide Supports an Expanding EV Market
Learn more about silicon carbide slurry performance improvement that address new technical challenges including increasing removal throughput, eliminating scratches, and low cost of ownership.
CMP Slurry Products
High performance slurries for scalable polishing of hard materials (single and polycrystalline surfaces).
High performance slurries for scalable manufacturing of atomically smooth and defect-free SiC wafers.
High performance slurries for scalable manufacturing of atomically smooth and defect-free nitride surfaces.
High performance slurries for scalable manufacturing of sapphire wafers
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