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Chemical Delivery Systems

Containers, vaporizers and equipment for liquid and solid chemistry delivery needs.

We provide containers, vaporizers, and equipment necessary to safety and effectively store and deliver chemistries to the process chamber for the most advanced processes and challenging chemistries.

Featured White Paper

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Solid Precursors for 3D Architectures: Materials, Processing, and Delivery
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Featured White Paper

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Solid Precursors for 3D Architectures: Materials, Processing, and Delivery
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Featured White Paper

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Solid Precursors for 3D Architectures: Materials, Processing, and Delivery
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Solid Chemical Delivery Systems

Solid chemical delivery systems providing a stable mass flux and a wide variety of solid materials used in current and future technology nodes.
Liquid Chemical Delivery Systems

We provide containers, vaporizers and equipment necessary to safety and effectively store and deliver chemistries to the process chamber for the most advanced processes and challenging chemistries.