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Chemistries

As a provider of advanced specialty materials and delivery systems, we have the expertise to formulate and deliver the chemistries you need to enable your process and reach your performance goals

Entegris provides materials, material handling equipment and containers for ALD, CVD, post-CMP, post-Etch and other applications.

Featured White Paper

The Silicon Precursor Toolbox for Low-temperature Deposition

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Chemical Delivery Systems

Containers, vaporizers and equipment for liquid and solid chemistry delivery needs

Specialty Chemicals

Formulated chemistries and precursor materials for your most challenging process