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AMC Filters

Solution for airborne molecular contamination (AMC) control.

Entegris provides a portfolio of airborne molecular contamination control to help you control contaminants in the entire fab and protecting both process equipment and wafers from the damaging effects of AMC.

Featured Technical Paper

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Fire Emissions and Smoke Impact on Industrial Environments
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Featured Technical Paper

download-pdf
Fire Emissions and Smoke Impact on Industrial Environments
Download Now

Featured Technical Paper

download-pdf
Fire Emissions and Smoke Impact on Industrial Environments
Download Now

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Stepper and Scanner Filters

Entegris’ stepper and scanner filters are designed to provide reliable protection from airborne molecular contamination sources. Use Entegris filters confidently in a variety of work areas and tool makers.
Process Tool Air Filters

Entegris tool AMC filters provide superior protection from common AMC in the fab including molecular acids, bases and organics. Tool AMC filters utilize both standard filtration media and custom media blends to meet various AMC removal requirements.
Facility Filtration

Superior protection for advanced technology environments. Field- and lab-proven for use in manufacturing environments including semiconductor processing and LED manufacturing, flat panel production, libraries, airports, hospitals, and control rooms.
Filter Housings and Stand-alone Filter Cabinets

Chemically purify environmental air for photolithography exposure tools and small environments. These filter housings protect exquipment from a full range of airborne molecular contaminants.