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Gas Filtration and Purification

When it comes to filtration and purification of air, bulk gas or spec gas, Entegris has the expertise, the technology and the solution to meet your needs

Whether for point of use or bulk gas delivery, in chamber or on wafer, in the cleanroom or on a tool, Entegris has a long history of providing high-performance gas and air purification and filtration products to meet your needs.

Featured Pictogram

download-pdf
Hiding in Plain Sight: A Preventive Maintenance Strategy to Improve Gas Purity and Reduce Wafer Defects
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Featured Pictogram

download-pdf
Hiding in Plain Sight: A Preventive Maintenance Strategy to Improve Gas Purity and Reduce Wafer Defects
Download Now

Featured Pictogram

download-pdf
Hiding in Plain Sight: A Preventive Maintenance Strategy to Improve Gas Purity and Reduce Wafer Defects
Download Now
AMC Filters

Cleanroom, scanner and process tool chemical air filters
Air and Gas Filter Membranes

Hydrophobic MCE membranes for air and gas filtration
Gas Filters

Contamination control in gas processes with nickel, stainless steel and PTFE membrane technologies
Gas Diffusers

Rapid venting to atmosphere without adding particles to the chamber
Gas Purifiers

A wide variety of materials are available to purify gas to parts-per-trillion (ppt) levels
PS14 Ambient Temperature Gas Purifiers

Gas Purifier Outdoor Enclosure