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Gas Filters

Nickel, stainless steel, Alloy-22, and PTFE filter technologies.

Entegris ultrapure gas filtration products offer 0.0015 micron particle filtration for ultrapure gas applications. Wafergard® gas filters enable higher process gas throughput while reducing the overall gas box footprint.

featured white paper

download-pdf
Eliminating Unwanted Oxygen: Preventing Device Failure at the Source
Download now

featured white paper

download-pdf
Eliminating Unwanted Oxygen: Preventing Device Failure at the Source
Download now

featured white paper

download-pdf
Eliminating Unwanted Oxygen: Preventing Device Failure at the Source
Download now
video

The History of Gas Filtration

Rob Zeller, research engineering, explains what a gas filter is, the history of gas filtration, and their introduction into highly-specialized semiconductor chip manufacturing applications that require stringent cleanliness specifications to maintain productivity and yield. Runtime: 8:32

Other Gas Filters

Wafergard® GN gas filter guns are an easy-to-use, lightweight POU (point-of-use) solution to control gas contamination. The filter element is an exclusive Entegris design used in various semiconductor processes.
In-Line PTFE Gas Filters

Our gas filters provide superior particulate filtration to minimize pressure drop and to maximize filter lifetime. Choose from Wafergard® and Linegard™ in-line gas filters.
In-Line Stainless Steel Gas Filters

Entegris' in-line stainless steel gas filters are designed for use in high-pressure and high-temperature applications. They're easy to install without requiring design changes.
In-Line Nickel Gas Filters

Entegris' ultrapure nickel filters are the cleanest and most efficient gas filtration products for high-pressure, high-temperature applications.
Surface Mount Gas Filters

Available with stainless steel or nickel filter elements, Wafergard® gas filters provide ultimate process protection, superior corrosion-resistance, and excellent compatibility with inert, hydride, and reactive gases. The surface-mount design consumes less space on gas panels and reduces parts inventories and variations. Our surface mount gas filter portfolio includes C-Seal 1.125" and W-Seal 1.125" or 1.5" formats.