• our science our science Our Science

    • By Industry

      • Life Sciences

      • Microelectronics

        • Semiconductor

        • Data Storage

        • Flat Panel Display

        • LED

        • Solar

      • Industrial

        • Aerospace

        • Chemical Manufacturing

        • Chromatography and Analytical

        • Coatings, Inks, and Adhesives

        • EDM

        • General Industrial

        • Glass Forming

        • Polymer Manufacturing

        • Water Treatment

        • Commercial Air Quality

    • By Role

      • Logic Manufacturers

      • Memory Manufacturers

      • Semiconductor Equipment Manufacturers

      • Chemical Suppliers

      • Bioprocessors

    • By Solution Area

      • Contamination Control

      • Fluid Management

      • Life Sciences

      • Specialty Materials

      • Substrate Handling

    • By Service

      • Analytical Services

      • Field Support Services

      • FOUP Services

      • Life Sciences Contract Development Services

      • Refurbishment Services

      • Regeneration Services

      • Technology Centers

        • China Technology Center

        • Life Sciences Technology Center

  • product catalog product catalog Product Catalog

    • Chemistries

      • Chemical Delivery Systems

        • Solid Chemical Delivery Systems

        • Liquid Chemical Delivery Systems

      • Specialty Chemicals

        • Catalysts

        • Coating, Ink, and Adhesive Ingredients

          • Resin Monomers and Components

          • Surface Modifiers

        • Electronic Chemicals

        • Post-CMP Cleaning Solutions

          • Semiconductor Cleaning Solutions

            • PlanarClean® Cleaning Solutions

            • ESC Cleaning Solutions

          • Wide Band Gap Semiconductor Cleaning Solutions

          • HDD Media Substrate Cleaning Solutions

        • Post Etch Cleaning Solutions

          • TitanKlean® Cleaning Solutions

          • ST Cleaning Solutions

          • NOE Etchant Cleaning Solutions

        • Precursors

          • Upstream ALD/CVD Precursors

          • Advanced Deposition Materials (ADM) ALD/CVD Precursors

        • Slurries

        • Silanes

        • Organophosphorus Compounds

        • Specialty Acrylates and Methacrylates

        • Siloxanes

        • Specialty Additives

        • Ligands

        • Wafer Reclaim

    • Device Trays

      • Tray Wizard

      • H20 Series Accessories

      • H44 Series Accessories

    • Fluid Management Systems

      • Fittings Selection Tool

      • Liquid Packaging

        • Chemical and Bioprocessing Containers

          • FluoroPure® HDPE Blowmolded Drums

            • FluoroPure® Advantage Trilayer HDPE Blowmolded Drums

            • FluoroPure® Trilayer HDPE Blowmolded Drums

          • FluoroPure® Composite Drums

          • FluoroPure® Custom Products

        • Single-Use Assemblies

          • 2D and 3D Bags

          • Mixing Systems

          • Motion Bioreactor Bags

          • Microcarrier and Cell Separation Systems

          • Secondary Containment

        • NOWPak® Liner Based Systems

        • Sentry® Quick Connect Systems

        • FluoroPure® Intermediate Bulk Containers

        • FluoroPure® Port Options, Tools and Accessories

        • Tube Sets and Manifolds

        • Custom Dip Tubes

        • FluoroPure® Pressure Vessels

        • Process Tanks

      • Valves Selection Tool

      • Fluid Handling

        • Fittings

          • PrimeLock® Tube Fittings

          • PrimeLock® ESD Tube Fittings

          • PrimeLock® Accessories

          • Flaretek® Tube Fittings

          • Flaretek® Accessories

          • Cynergy® Fittings

          • Cynergy® Accessories

          • EP PFA Flare Fittings

          • EP PFA Flare Fitting Accessories

          • PureBond® Welded Tube Fittings

          • Quikgrip® Tube Fittings

          • Quikgrip® PFA Nuts

          • Integral Ferrule Tube Fittings

          • Integral Ferrule Accessories

          • Barb PFA Tube Fittings

          • Dual Containment Fittings

          • PureBond® Welded Pipe Fittings

          • PureBond® Accessories

          • NPT Pipe Fittings

          • NPT Accessories

        • Valves

          • CR and CH Series Valves

            • CR4 Series Valves

            • CR8 Series Valves

            • CH8 Series High-Temperature Valves

            • CRE4 Series Valves

            • CRE8 Series Valves

          • Integra® Valves

          • EP PFA Valves

          • Manifolds and Assemblies

          • Plug Valves

          • Needle/Metering Valves

          • Stopcock Valves

          • Check Valves

          • Valve Accessories

          • Integra® Plus WS ESD Valves

        • Fluid Handling Accessories

          • Spray Products

          • Aspirators

          • Fasteners

        • Valves Selection Tool

        • Fittings Selection Tool

        • Tubing and Pipe

        • Custom Products

      • Process Monitoring

        • Process Control

          • Integrated Flow Controllers

          • NT™ Proportional Control Valves

          • Photochemical Dispense Pumps

        • Process Measurement

          • Concentration Monitors

          • Electronic Flowmeters

          • NT™ Pressure Transducers

        • Particle Characterization

    • Gas Filtration and Purification

      • Gas Diffusers

        • Chambergard™ Gas Diffusers

      • Gas Filters

        • Other Gas Filters

        • In-Line PTFE Gas Filters

        • In-Line Stainless Steel Gas Filters

        • In-Line Nickel Gas Filters

        • Surface Mount Gas Filters

      • AMC Filters

        • Stepper and Scanner Filters

        • Process Tool Air Filters

        • Facility Filtration

        • Filter Housings and Stand-alone Filter Cabinets

      • Gas Purifiers

    • Hard Disk Component Handling

      • Storage Boxes and Individual Disk Packages

      • Read-Write Trays and Carriers

      • Disk Shippers

      • Disk Process Carriers

    • Liquid Filtration and Purification

      • Liquid Filters

      • Liquid Purifiers

      • Liquid Filter Housings

    • Mask and Reticle Handling

      • Reticle Pods and Purge Cabinets

      • Mask Carriers and Shipping Boxes

      • Mask Packages

    • Other Substrate Handling

      • Miscellaneous Device Processing

      • Solar Cell Solutions

    • Specialty Gases

      • Specialty Gas Mixtures

      • Gas Delivery Cylinder Systems

      • Gas Delivery Cabinet Systems

      • Gases

    • Specialty Materials

      • Premium Graphite

        • Industrial Graphite Grades

        • Semiconductor Graphite Grades

        • Life Sciences Graphite Grades

        • Premium Graphite Components

        • Glass Forming Graphite Grades

        • GLASSMATE® Components

        • Graphite Processing Options

        • Aerospace Components

      • Coatings

        • Chucks

        • Plasma Enhanced Chemical Vapor Deposition (PECVD) Coatings

        • Caerus™ Coating Technology

        • Pegasus™ Coating Technology

      • Premium Silicon Carbide

        • SUPERSiC<sup>®</sup> Silicon Carbide Components

        • SUPERSiC<sup>®</sup> Silicon Carbide

      • Advanced Cleaning Materials

    • Wafer Handling

      • Wafer Processing

        • CMP Cleaning Brushes

        • CMP Pads

        • 300 mm Front Opening Unified Pods (FOUPs)

        • 200 mm Wafer Processing

        • 200 mm Accessories

        • 150 mm Wafer Processing

        • 150 mm and Smaller Wafer Carrier Accessories

        • 125 mm Wafer Processing

        • 100 mm Wafer Processing

        • 76.2 mm 3" Wafer Processing

        • 2.5" and Smaller Wafer Processing

        • Labware

        • Chucks

      • Wafer Shipping

        • 300 mm Wafer Shippers

        • 200 mm Wafer Shippers

        • 150 mm Wafer Shippers

        • 125 mm Wafer Shippers

        • 100 mm Wafer Shippers

        • 76.2 mm (3") Wafer Shippers

        • 2.5" and Smaller Wafer Shippers

      • Finished Wafer Shipping

        • SmartStack® Contactless Horizontal Wafer Shipper

        • SmartStack® Horizontal Wafer Shippers

        • Film Frame Rings and Shippers

  • resources resources Resources

    • Reference Materials

    • Technical Information

      • Calculators and Tools

      • Chemical Compatibility

      • Chemlock® Filter Housing Technical Information

      • Component Technical Information

      • Entegris Test Standards and Protocols

      • FAQ

      • Formulas

      • Glossary

      • Material Properties and Safety

      • Particle Characterization Applications

    • Industry Insights

      • 3D NAND Solutions

      • Accelerating Speed-to-Yield with High-Purity Materials Solutions

      • Achieving Hydrogen Purity Standards for Fuel Cells

      • Advanced Coatings

      • Advanced Deposition Materials Innovation

      • Automotive Reliability

      • Cars and Chips: The Acceleration of Electronic Systems

      • Chasing the Perfect Pattern

      • Chemical Mechanical Planarization (CMP)

      • Clean Chemical Delivery

      • Clean Gas Delivery

      • CMP Process Monitoring

      • Cold Chain Bioprocessing

      • Dual Containment Tubing

      • Electrostatic Discharge (ESD) Prevention

      • Enabling Advanced Lithography

      • End-to-End Gas Filtration Solutions

      • Food and Beverage Contamination Control

      • Front-end to Back-end Solutions

      • Glass in Front; Glass in Back

      • High-Density Cell Banking

      • High Purity Chemical Manufacturing

      • Holistic Approach to Enabling Device Performance, Yield, and Reliability

      • Low-Temperature Bioprocessing

      • More Than Just a Chip Tray

      • Operational Excellence

      • Pandemic Response

      • Particle Characterization

      • Pervasive Defectivity in Semiconductor Manufacturing

      • Protecting Your Data Center Environment from Gas-Phase Contamination

      • Silicon Carbide Substrate Solutions

      • Solid Precursors and Delivery Systems

      • Solving Advanced Technology Challenges with Innovative Materials

      • Specialty Gases and Delivery Systems for Ion Implantation

      • Storage Class Memory

      • Targeted Contaminant Removal

      • The Rare Air of the Semiconductor Fab

      • The Silicon Precursor Toolbox for Low-Temperature Deposition

    • Ensights (Blog)

    • Scientific Report

  • about us about us About Us

    • Corporate Overview

    • Corporate Social Responsibility

    • Careers

    • Events

    • Investor Relations

    • Legal/Trademark Notices

    • Locations

    • News Releases

    • Entegris Blog

    • Manufacturing

Our Sites Our Sites Our Sites
more more More

Gas Filters

Nickel, stainless steel, Alloy-22, and PTFE filter technologies.

Entegris ultrapure gas filtration products offer 0.0015 micron particle filtration for ultrapure gas applications. Wafergard® gas filters enable higher process gas throughput while reducing the overall gas box footprint.

featured white paper

download-pdf
Eliminating Unwanted Oxygen: Preventing Device Failure at the Source
Download now

featured white paper

download-pdf
Eliminating Unwanted Oxygen: Preventing Device Failure at the Source
Download now

featured white paper

download-pdf
Eliminating Unwanted Oxygen: Preventing Device Failure at the Source
Download now
video

The History of Gas Filtration

Rob Zeller, research engineering, explains what a gas filter is, the history of gas filtration, and their introduction into highly-specialized semiconductor chip manufacturing applications that require stringent cleanliness specifications to maintain productivity and yield. Runtime: 8:32

Other Gas Filters

Wafergard® GN gas filter guns are an easy-to-use, lightweight POU (point-of-use) solution to control gas contamination. The filter element is an exclusive Entegris design used in various semiconductor processes.
In-Line PTFE Gas Filters

Our gas filters provide superior particulate filtration to minimize pressure drop and to maximize filter lifetime. Choose from Wafergard® and Linegard™ in-line gas filters.
In-Line Stainless Steel Gas Filters

Entegris' in-line stainless steel gas filters are designed for use in high-pressure and high-temperature applications. They're easy to install without requiring design changes.
In-Line Nickel Gas Filters

Entegris' ultrapure nickel filters are the cleanest and most efficient gas filtration products for high-pressure, high-temperature applications.
Surface Mount Gas Filters

Available with stainless steel or nickel filter elements, Wafergard® gas filters provide ultimate process protection, superior corrosion-resistance, and excellent compatibility with inert, hydride, and reactive gases. The surface-mount design consumes less space on gas panels and reduces parts inventories and variations. Our surface mount gas filter portfolio includes C-Seal 1.125" and W-Seal 1.125" or 1.5" formats.