Gas Filters


Nickel, stainless steel, Hastelloy®, and PTFE filter technologies.

Entegris ultrapure gas filtration products offer 0.0015 micron particle filtration for ultrapure gas applications. Wafergard® gas filters enable higher process gas throughput while reducing the overall gas box footprint.

Featured Content

End-to-End Gas Filtration Solutions

Featured Content

End-to-End Gas Filtration Solutions

Featured Content

End-to-End Gas Filtration Solutions