Nickel, stainless steel, Hastelloy®, and PTFE filter technologies.
Entegris ultrapure gas filtration products offer 0.0015 micron particle filtration for ultrapure gas applications. Wafergard® gas filters enable higher process gas throughput while reducing the overall gas box footprint.
Available with stainless steel or nickel filter elements, Wafergard® gas filters provide ultimate process protection, superior corrosion-resistance, and excellent compatibility with inert, hydride, and reactive gases. The surface-mount design consumes less space on gas panels and reduces parts inventories and variations. Our surface mount gas filter portfolio includes C-Seal 1.125" and W-Seal 1.125" or 1.5" formats.