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Specialty Gases

Safe and efficient technologies to deliver highly toxic gases

We provide a variety of gas packages to fit a wide range of needs. From semiconductor applications to solar processes to flat panel display manufacturing, we have the right gas in the right package and delivery source for you.

Specialty Gas Mixtures

As experts in applied process gas, we are always working to increase your efficiency, safety and performance in gas applications. Creating gas blends in customized proportions is yet another way we can support your needs.

Gas Delivery Cylinder Systems

Gas Delivery Cabinet Systems

Entegris high-purity gas cabinet systems have been designed to deliver a full range of processed toxic gases subatmospherically, eliminating the risk of catastrophic gas release and ensuring a safer work environment.

Gases

You need the right gas at the right time in the right package, and we can help. When it comes to gas and gas delivery, go with the experts for your Arsine, Phosphine, Boron Trifluoride and Germanium Tetrafluoride needs.