Protecting your investments with unmatched ion implant application safety and efficiency
As semiconductor manufacturers reach towards ever smaller nodes, they place increasing demands on their supply of electronic gases. Manufacturers need these gases to be available in greater quantities and at higher levels of purity. This challenges gas suppliers, especially because these gases are often dangerous if mishandled.
Manufacturers need to secure the right components to protect investments into the implantation facility, which will guarantee the performance they are looking for, as well as the safety of their employees and equipment.
Entegris has long been a leader in safe gas delivery, pioneering the development of the Safe Delivery Source® (SDS®) package over 30 years ago. This product family provides subatmospheric gas storage and delivery for ion implant dopant materials and has been adopted by the entire industry after being proven to increase safety and efficiency.
Technical Paper
H2 Generator for Ion Implant: Gas Mixture Delivery Via Cylinder Improves Ion Implant Integrity
Hydrogen generators appear to save money, but an in-situ approach could create long term issues that affect productivity and increase equipment downtime.
Introducing SDS®4, our newest gas delivery product
The SDS® product family from Entegris has represented the pinnacle of safety and efficiency for over three decades. Our newest gas package, SDS®4, has been carefully designed to address urgent demands for unparalleled safety, performance, and reliability. After quantifying our performance through internal and external product testing at multiple customer sites, we can confirm that SDS®4 exceeds industry standards.
Learn more about SDS®4 performance:
Posters
Performance & Reliability of the Fourth Generation of Safe Delivery Source® (SDS®4) in the Ion Implantation Application
Entegris has utilized its extensive subatmospheric storage and delivery (SAGS) application knowledge, combined with the broad capabilities of materials science and mechanical design, to develop the fourth generation of the Safe Delivery Source® (SDS®4).
Performance on the Fourth Generation of Safe Delivery Source® (SDS®4) Package on AIBT iPulsar High Current Implanter
This poster describes the qualification and performance of SDS4 phosphine (PH3) and SDS4 arsine (AsH3) cylinders on an AIBT production tool and compares the results to the current baseline of SDS®3.
Results and Adoption of Safe Delivery Source® (SDS®4) on VIISta® HCP
Entegris’ commitment to the semiconductor industry focuses on quality, safety, and performance. SDS®3 has effectively met the needs of the industry; however, increasing requirements, coupled with Entegris’ drive to bring continuous innovation to the market, has led to the development of SDS®4.
Pictogram
We have SDS®4
Take a visual deep dive into the redesigned SDS®4 gas package. From the valve safety indicator to the improved carbon media, you’ll find a product that builds on what is already one of the highest-performing gas delivery systems in the electronic chemicals industry.
Featured Solution
SDS®4 Safe Delivery Source® is our newest technology available for delivering highly toxic gases. It has been carefully designed to address urgent demands for unparalleled safety, performance and reliability, and it exceeds industry standards based on internal and external testing.
Interested in learning more about our solutions?
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