Protecting your investments with unmatched ion implant application safety and efficiency
As semiconductor manufacturers reach towards ever smaller nodes, they place increasing demands on their supply of electronic gases. Manufacturers need these gases to be available in greater quantities and at higher levels of purity. This challenges gas suppliers, especially because these gases are often dangerous if mishandled.
Manufacturers need to secure the right components to protect investments into the implantation facility, which will guarantee the performance they are looking for, as well as the safety of their employees and equipment.
Entegris has long been a leader in safe gas delivery, pioneering the development of the Safe Delivery Source® (SDS®) package over 30 years ago. This product family provides subatmospheric gas storage and delivery for ion implant dopant materials and has been adopted by the entire industry after being proven to increase safety and efficiency.