Korea Technology Center
Our 12,000 square meter Korea Technology Center (KTC) provides advanced R&D, application support, and customer collaboration across deposition, chemical mechanical planarization (CMP), advanced wet etch, and cleaning, in addition to analytical and liquid microcontamination control applications capabilities.
KTC is located on the Hanyang University ERICA campus in Ansan-si, Gyeonggi-do, Korea and opened in 2025.
“The Korea Technology Center is key to our strategy of bringing our best capabilities even closer to our customers, further supporting the specialized needs of customers in Korea.”
James A. O’Neill
Ph.D., SVP and CTO
State-of-the-art facility for R&D, analytical and applications support, and customer collaboration
Advanced Deposition Materials
Synthesize proprietary precursors for next-generation semiconductors and provide optimal film deposition solutions using our in-house ALD equipment.
Wet Chemicals
Design, evaluate, and optimize formulations using advanced analysis tools to ensure products meet customer needs through full-wafer performance validation, delivering consistent quality from research to scale-up for customer evaluations.
CMP Slurries and Post CMP Cleans
Develop CMP slurries and post CMP cleans for next-generation devices in collaboration with chip manufacturers.
CMP Process Demonstration in a Class 10 Cleanroom
Enabling speedy development of CMP solutions through customer collaboration and providing topography and defect analysis.
Liquid Microcontamination Control Applications Capabilities
Characterize and evaluate liquid filters and purifiers for wet etch and clean, photo chemicals, and CMP slurries using advanced metrology tools and test stands to deliver solutions for yield enhancement.
“The Entegris Korea Technology Center represents more than just infrastructure. It’s a promise to our customers, partners, and academic collaborators — a promise to deliver innovation, flexibility, and results.”
Jaewon Kim
Country President, Korea